About: Novel Laser-based Hybrid Technologies for thin Film Deposition

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Projekt, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	http://linked.opendata.cz/ontology/domain/vavai/Projekt
rdfs:seeAlso	http://www.isvav.cz/projectDetail.do?rowId=IAA1010110
Description	The development of novel and modified thin film deposition techniques, study of their possibilities and characterization of discharge plasma is very important for creation of new types of thin films, multilayers, complex and doped layers, graded coatings, waveguiding films, nanostructures, etc. The improvement of present deposition systems, and construction of new hybrid deposition techniques, is necessary. Our attention will be focused on development of systems combining pulsed laser deposition witah concentrated RF and hollow cathode discharges, and magnetron sputtering. The RF biasing and laser modification of the film surface sill be also applied to inhance density and crystallization of the growing films. Formation processes in discharge plasma will be studied by diode-laser spectroscopy, OES, Langmuir probes and CCD camera. Films will be characterized by WDX, XRD, XPS, STM, SEM, Raman spectroscopy and spectroscopic ellipsometry. Microhardness and adhesion will be also tested. (en) Vývoj nových a modifikovaných depozičních technik, studium jejich možností a charakterizace plazmy jsou velmi důležité pro tvorbu nových typů tenkých vrstev a multivrstev, složitých a dopovaných vrstev, gradovaných pokrytí a vrstev s proměnným materiálovým profilem, vlnovodových vrstev, nanostruktur, atd. Tyto úkoly vyžadují zdokonalení současné depoziční techniky a vývoj nových hybridních depozičních systémů. Naše pozornost bude soustředěna na vývoj systémů kombinujících pulsní laserovou depozici s RF výboje, výbojem v duté katodě a s magnetronovým naprašováním. Zlepšené krystalizace a zhutnění vrstev bude dosaženo pomocí RF polarizace a laserové modifikace povrchu podložky. Procesy ve výbojovém plazmatu budou studovány pomocí diodové laserové spektroskopie, OES, Langmuirovských sond a CCD kamery. Vrstvy budou charakterizovány pomocí WDX, XRD, XPS, STM, SEM, Ramanovské spektroskopie a spektroskopické elipsometrie. Měřeny budou také mikrotvrdost a adheze vrstev.
Title	Novel Laser-based Hybrid Technologies for thin Film Deposition (en) Nové laserové hybridní technologie pro depozici tenkých vrstev
skos:notation	IAA1010110
http://linked.open...avai/cep/aktivita	Grants of distinctly investigative character focused on the sphere of research pursued at present particularly in the Academy of Sciences of the Czech Republic
http://linked.open...kovaStatniPodpora	http://linked.opendata.cz/resource/domain/vavai/projekt/IAA1010110/celkovaStatniPodpora
http://linked.open...ep/celkoveNaklady	http://linked.opendata.cz/resource/domain/vavai/projekt/IAA1010110/celkoveNaklady
http://linked.open...datumDodatniDoRIV	2007-09-26 (xsd:date)
http://linked.open...i/cep/druhSouteze	VS - Veřejná soutěž ve výzkumu a vývoji
http://linked.open...ep/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open.../cep/fazeProjektu	33611945
http://linked.open...ai/cep/hlavniObor	BL - Fyzika plasmatu a výboje v plynech
http://linked.open...hodnoceniProjektu	V - Vynikající výsledky (s mezinárodním významem apod.). Zároveň byly splněny cíle a předpokládané výsledky uvedené ve smlouvě / rozhodnutí o poskytnutí podpory.
http://linked.open...vai/cep/kategorie	ZV - Základní výzkum
http://linked.open.../cep/klicovaSlova	Pulsed laser deposition; thin films; laser plasma; hybrid deposition techniques; radiofrequency discharge; hollow cathode discharge; optical emission spectroscopy; magnetron sputtering; plasma processes (en)
http://linked.open...ep/partnetrHlavni	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...inujicichPrijemcu	1 (xsd:int)
http://linked.open...cep/pocetPrijemcu	2 (xsd:int)
http://linked.open...ocetSpoluPrijemcu	0 (xsd:int)
http://linked.open.../pocetVysledkuRIV	45 (xsd:int)
http://linked.open...enychVysledkuVRIV	45 (xsd:int)
http://linked.open...okUkonceniPodpory	2005
http://linked.open...okZahajeniPodpory	2001
http://linked.open...iciPoslednihoRoku	2006
http://linked.open...atUdajeProjZameru	2006
http://linked.open.../vavai/cep/soutez	SAV0-AB2001
http://linked.open...usZobrazovaneFaze	DUU
http://linked.open...ai/cep/typPojektu	P - Projekt výzkumu a vývoje financovaný ze státního rozpočtu
http://linked.open.../cep/vedlejsiObor	BM - Fyzika pevných látek a magnetismus JK - Koroze a povrchové úpravy materiálu
http://linked.open...jektu+dodavatelem	Vyvinut a realizován hybridní laserový depoziční systém kombinující současně laserovou ablaci, magnetronové naprašování a radiofrekvenční výboje. Byly deponovány a studovány tenké vrstvy nových typů materiálů za atypických technologických podmínek. (cs) Hybrid laser based deposition system, combining laser ablation, magnetron sputtering and radiofrequency discharges were developed. New thin film materials created under specific deposition conditions were studied. (en)
http://linked.open...tniCyklusProjektu	ZBBBKU
http://linked.open.../cep/klicoveSlovo	Pulsed laser deposition hollow cathode discharge hybrid deposition techniques laser plasma magnetron sputtering optical emission spectroscopy radiofrequency discharge thin films
is http://linked.open...vavai/riv/projekt of	Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering Subpicosecond and Enhanced Nanosecond PLD to Grow ZnO Films in Nitrogen Ambient Waveguiding ZnO and BaTiO3 thin films fabricated by laser deposition Laser-deposited thin films for butane detection Influence of the substrate temperature on the properties of nanocrystalline diamond/amorphous carbon composite films KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers Laser deposition of waveguiding films Study of the plasmas produced during the deposition of TiC/SiC thin films in a hybrid magnetron-laser system Structural and fluorescence properties of thin films fabricated by pulsed laser deposition technique from Nd:KGW single crystal Thin films growth parameters in MAPLE; application to fibrinogen Study of laser created ZrO2 and hydroxyapatite ZRO2 films for implantology Laser deposited thin organic and inorganic active layers for low temperature ozone sensors Study of nanocrystalline diamond film growth in rf hybrid laser deposition systems in O2, H2 and H2+Ar ambients Annealing of Bi 2 Te 3 thin films prepared by pulsed laser deposition. Optical and electro-optical properties of pulse laser deposited PLZT thin films Optical properties of Er:YAG and Er:YAP materials and layers grown by laser. First Observation of the Rotational Spectrum of the Bromomethyl Radical, CH2Br Chemical Bonding Study of Nanocrystalline Diamond Films Prepared by Plasma Techniques Nanocrystalline diamond films preparation by hybrid pulsed laser deposition Plasma study during pulsed laser deposition of nanocrystalline diamond/amorphous carbon composite thin films and their structural characterization Matrix assisted pulsed laser evaporation of pullulan tailor-made biomaterial thin films for controlled drug delivery systems The Submillimeter-wave Spectrum of the Chloromethyl Radical, CH2Cl, in the Ground Vibronic State Millimeter wave spectrum of bromomethyl radical, CH2Br Periodic oscilations of thin film properties with their thickness for mixed real Bi2(M+N)Te3 phases Hydroxyapatite and ZrO2 biocompatible coatings fabricated by pulsed laser deposition Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System. Luminescence properties of Er:YAG and Er:YAP thin films created by pulsed laser deposition Optical Emission Spectroscopy of Plasma in Hybrid Pulsed Laser Deposition System. Optical emission spectroscopy of nitrogen species and plasma plume induced by laser ablation combined with pulse modulated radio-frequency discharge. Pulsed laser deposition of homogenous DLC films Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers Study of RF discharge properties for hybrid pulsed laser deposition. Waveguiding Nd:KGW films prepared by pulsed laser deposition. Laser Plasma Plume Kinetic Spectroscopy of the Nitrogen and Carbon Species. Phase ac-sensitivity of oxidic and acetylacetonic gas sensors. Nanocrystalline diamond/amorphous carbon composite films prepared by MWCVD Study of plasma in hybrid PLD system for CNx films creation Influence of RF discharges on nanocrystalline diamond films growth by pulsed laser deposition Gradient Titanium-Carbon Layers Grown by Pulsed Laser Deposition Combined with Magnetron Sputtering Pulsed Laser Deposition of Inorganic and Organic Thin Films for Active Layers of Ozone Sensors Progress in Optical Waveguiding Thin Films Study of Plasma Processes during Pulsed Laser Ablation of Graphite Target in Nitrogen Properties of Er-doped layers grown from Er:YAG(YAP) crystalline targets by sub-picosecond laser deposition
is http://linked.open...vavai/cep/projekt of	http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2001/ico%3A61388955 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2001/ico%3A68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2002/ico%3A61388955 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2002/ico%3A68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2003/ico%3A61388955 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2003/ico%3A68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2004/ico%3A61388955 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2004/ico%3A68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2005/ico%3A61388955 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2005/ico%3A68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/IAA1010110/2006/ico%3A61388955

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