About: Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers     Goto   Sponge   NotDistinct   Permalink

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Description
  • An excimer laser combined with magnetron sputtering was used for TiC-layer deposition. Various laser-magnetron configurations and deposition regimes were tested. The growth rate and the film-thickness homogeneity were studied. The film properties were characterized by XRD, Raman spectroscopy, scratch test, and microhardness measurements. Plasma plumes were detected by optical-emission spectroscopy. Films con- taining TiC nanocrystals embedded in a-C matrix were fabricated at room substrate temperature on large-area silicon substrates.
  • An excimer laser combined with magnetron sputtering was used for TiC-layer deposition. Various laser-magnetron configurations and deposition regimes were tested. The growth rate and the film-thickness homogeneity were studied. The film properties were characterized by XRD, Raman spectroscopy, scratch test, and microhardness measurements. Plasma plumes were detected by optical-emission spectroscopy. Films con- taining TiC nanocrystals embedded in a-C matrix were fabricated at room substrate temperature on large-area silicon substrates. (en)
Title
  • Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers
  • Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers (en)
skos:prefLabel
  • Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers
  • Hybrid Laser-Based Thin-Film Deposition for Nanocrystalline Titanium Carbide Layers (en)
skos:notation
  • RIV/68407700:21460/05:00113074!RIV10-MSM-21460___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1010110), V, Z(AV0Z10100520)
http://linked.open...iv/cisloPeriodika
  • 2
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 523910
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21460/05:00113074
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • TiC-layer; excimer laser; magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • RU - Ruská federace
http://linked.open...ontrolniKodProRIV
  • [E42759709C20]
http://linked.open...i/riv/nazevZdroje
  • Laser Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 15
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
http://linked.open...ain/vavai/riv/wos
  • 000227121500001
http://linked.open...n/vavai/riv/zamer
issn
  • 1054-660X
number of pages
http://localhost/t...ganizacniJednotka
  • 21460
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