About: Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering

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About: Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We prepared nanostructured coatings composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed laser deposition (PLD) with magnetron sputtering. The whole deposition process was fully computer controlled. The coatings consist from a number of 1-20 nm-thick alternating particular layers forming in total 0.4 um-thick structure. A set of samples with different relative composition of Ti, TiC and DLC were prepared. Thin interlayer of titanium carbide was formed by simultaneous process of pulsed laser deposition (carbon) and magnetron sputtering (Ti). Microstructure was characterized by XRD. Mechanical properties were measured. The deposition process was investigated using an optical emission spectroscopy. The plasma was analyzed with a spatial and a time resolution. We prepared nanostructured coatings composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed laser deposition (PLD) with magnetron sputtering. The whole deposition process was fully computer controlled. The coatings consist from a number of 1-20 nm-thick alternating particular layers forming in total 0.4 um-thick structure. A set of samples with different relative composition of Ti, TiC and DLC were prepared. Thin interlayer of titanium carbide was formed by simultaneous process of pulsed laser deposition (carbon) and magnetron sputtering (Ti). Microstructure was characterized by XRD. Mechanical properties were measured. The deposition process was investigated using an optical emission spectroscopy. The plasma was analyzed with a spatial and a time resolution. (en)
Title	Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering (en)
skos:prefLabel	Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering (en)
skos:notation	RIV/68407700:21460/05:00113044!RIV10-MSM-21460___
http://linked.open...avai/riv/aktivita	P V Z
http://linked.open...avai/riv/aktivity	P(GP106/02/P015), P(IAA1010110), P(LN00A015), V, Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	1-4
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Jelínek, Miroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta biomedicínského inženýrství
http://linked.open...dnocenehoVysledku	536184
http://linked.open...ai/riv/idVysledku	RIV/68407700:21460/05:00113044
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	DLC; PLD (en)
http://linked.open.../riv/klicoveSlovo	PLD DLC
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[33FFC4DF1451]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Research center for optics Development and adaptation of pulsed laser deposition technique for gradient and nanostructured layer growth Novel Laser-based Hybrid Technologies for thin Film Deposition
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	200
http://linked.open...iv/tvurceVysledku	Jelínek, Miroslav
http://linked.open...ain/vavai/riv/wos	000232327800156
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0257-8972
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	21460
is http://linked.open...avai/riv/vysledek of	Plasma Study and Deposition of DLC/TiC/Ti Multilayer Structures Using Technique Combining Pulsed Laser Deposition and Magnetron Sputtering

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