About: Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition     Goto   Sponge   NotDistinct   Permalink

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  • Titanium-carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited an the same Si substrate dimensions of 3 x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of Jcm-2 and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES).
  • Titanium-carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited an the same Si substrate dimensions of 3 x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of Jcm-2 and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES). (en)
  • Titan-karbonitridové tenké vrstvy byly deponovány při pokojové teplotě hybridní depozicí kombinující DC magnetron a KrF laserovou depozici. Bylo deponováno v dusíkové atmosféře 1 Pa - 5 Pa, hustota laserové energie 15 Jcm-2 a výkon magnetronu 150 W. Bylo studováno složení vrstvy a XRD. (cs)
Title
  • Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition
  • Studie tenkých TiCxN1-x vrstev vyrobených hybridní magnetron-laserovou depozicí (cs)
  • Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition (en)
skos:prefLabel
  • Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition
  • Studie tenkých TiCxN1-x vrstev vyrobených hybridní magnetron-laserovou depozicí (cs)
  • Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition (en)
skos:notation
  • RIV/68378271:_____/05:00041223!RIV07-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 61800G/1;61800G/5
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1010110), Z(AV0Z10100522)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
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  • 545296
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/05:00041223
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • laser deposition; magnetron; radiofrequency discharge; TiCN; thin films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [1532EEC4AB55]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Bellingham
http://linked.open...i/riv/nazevZdroje
  • Proceeding of SPIE - Int. Connference on Lasers, Applications, and Technologies 2005. Laser-Assisted Micro- and Nanotechnologies
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Studnička, Václav
  • Kadlec, J.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • SPIE
https://schema.org/isbn
  • 0-8194-6213-6
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