About: Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

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About: Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Goto Sponge NotDistinct Permalink

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Attributes	Values
rdf:type	http://linked.opendata.cz/ontology/domain/vavai/Projekt
rdfs:seeAlso	http://www.isvav.cz/projectDetail.do?rowId=GA202/07/1669
Description	The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation(controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy. (en) Podstatou navrhovaného projektu je vyvinout depoziční systém pro přípravu termálně stabilních nanostrukturovaných diamantu podobných uhlíkových vrstev s využitím dvojfrekvenčního kapacitního plazmatu (DFCCP). Kombinací vysokofrekvenčího buzení, které zajišťuje stabilitu a vysokou hustotu plazmatu, a nízkofrekvenčního buzení, kterým lze nezávisle kontrolovat energii iontů, chceme dosáhnout kontrolovaného růstu vrstev. Předmětem studia bude nalezení optimální kombinace vysokofrekvenčního a nízkofrekvenčního (kontinuálního nebo pulzního) buzení umožňujíci rovnoměrně pokrýt nerovné, stupňovité povrchy substrátů i podstatné snížení vnitřního pnutí ve vrstvách. Je plánovaná komplexní diagnostika DFCCP i počítačová simulace pro popis a pochopení procesů probíhajících se během depozice. Připravené vrstvy budou rozsáhle charakterizovány jak z hlediska jejich struktury (RBS, ERDA, TOF ERDA, HRTEM, SEM atd.) tak i z hlediska jejich vlastností (např. ellipsometrie, spektrofotometrie, mikro- a nanovtiskové testy). Termální stabilta vrstev bude studována metodou termální desorpční spektroskopie.
Title	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges (en) Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
skos:notation	GA202/07/1669
http://linked.open...avai/cep/aktivita	Standard projects
http://linked.open...kovaStatniPodpora	http://linked.opendata.cz/resource/domain/vavai/projekt/GA202%2F07%2F1669/celkovaStatniPodpora
http://linked.open...ep/celkoveNaklady	http://linked.opendata.cz/resource/domain/vavai/projekt/GA202%2F07%2F1669/celkoveNaklady
http://linked.open...datumDodatniDoRIV	2015-03-02 (xsd:date)
http://linked.open...i/cep/druhSouteze	VS - Veřejná soutěž ve výzkumu a vývoji
http://linked.open...ep/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open.../cep/fazeProjektu	91489926
http://linked.open...ai/cep/hlavniObor	BL - Fyzika plasmatu a výboje v plynech
http://linked.open...hodnoceniProjektu	V - Vynikající výsledky (s mezinárodním významem apod.). Zároveň byly splněny cíle a předpokládané výsledky uvedené ve smlouvě / rozhodnutí o poskytnutí podpory.
http://linked.open...vai/cep/kategorie	ZV - Základní výzkum
http://linked.open.../cep/klicovaSlova	PECVD; dvojfrekvenční kapacitní výboj DF CCP; nanostrukturovaný DLC; thermomechanická stabilita (en)
http://linked.open...ep/partnetrHlavni	Přírodovědecká fakulta
http://linked.open...inujicichPrijemcu	0 (xsd:int)
http://linked.open...cep/pocetPrijemcu	1 (xsd:int)
http://linked.open...ocetSpoluPrijemcu	3 (xsd:int)
http://linked.open.../pocetVysledkuRIV	50 (xsd:int)
http://linked.open...enychVysledkuVRIV	50 (xsd:int)
http://linked.open...lneniVMinulemRoce	2011-04-16 (xsd:date)
http://linked.open.../prideleniPodpory	http://linked.opendata.cz/resource/domain/vavai/cep/prideleniPodpory/202%2F07%2F1669
http://linked.open...iciPoslednihoRoku	2011
http://linked.open...atUdajeProjZameru	2012
http://linked.open.../vavai/cep/soutez	SGA02007GA-ST
http://linked.open...usZobrazovaneFaze	DUU
http://linked.open...ai/cep/typPojektu	P - Projekt výzkumu a vývoje financovaný ze státního rozpočtu
http://linked.open...ep/ukonceniReseni	2011-12-31 (xsd:date)
http://linked.open.../cep/vedlejsiObor	BM - Fyzika pevných látek a magnetismus BJ - Termodynamika
http://linked.open...ep/zahajeniReseni	2007-01-01 (xsd:date)
http://linked.open...jektu+dodavatelem	Řešení projektu proběhlo výtečně, jak z hlediska odborného tak i z hlediska čerpání finančních prostředků. (cs) The project was excellent, both in terms of expertise and in terms of disbursement of funds. (en)
http://linked.open...tniCyklusProjektu	ZBBBKU
http://linked.open.../cep/klicoveSlovo	PECVD dvojfrekvenční kapacitní výboj DF CCP nanostrukturovaný DLC
is http://linked.open...vavai/riv/projekt of	Laser ablation synthesis of new gold carbides. From gold-diamond nano-composite as a precursor to gold-doped diamonds. Time-of-flight mass spectrometric study Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge Local mechanical properties 2007 Artificial neural networks in medical diagnosis Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films Application of higher harmonic frequencies generated in RF plasmas for monitoring of deposition processes Evaluation of hardness, tribological behaviour and impact load of carbon-based hard composite coatings exposed to the influence of humidity. Formation of aluminium, aluminium nitride and nitrogen clusters via laser ablation of nano aluminium nitride. Laser desorption ionisation and matrixassisted laser desorption ionisation timeofflight mass spectrometry Influence of DLC films on higher harmonic frequencies in capacitive discharges Air DCSBD plasma treatment of Al surface at atmospheric pressure Preparation of protective coatings on polycarbonate from CH4/HMDSZ mixture using PECVD Organosilicon thin films deposited by plasma enhanced CVD: Thermal changes of chemical structure and mechanical properties Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates Combination of Synchrotron Ellipsometry and Table-Top Optical Measurements for Determination of Band Structure of DLC Films Dielectric response and structure of amorphous hydrogenated carbon films with nitrogen admixture Tissue profiling by nanogold-mediated mass spectrometry and artificial neural networks in the mouse model of human primary hyperoxaluria 1 Tissue visualization mediated by nanoparticles: from tissue staining to mass spectrometry tissue profiling and imaging Modeling of optical constants of diamond-like carbon Influence of substrate material on plasma indeposition/sputtering reactor: experiment and computer simulation THE CHEMISTRY OF GOLD CLUSTERS IN PLASMA GENERATED WITH MALDI, LASER DESORPTION IONISATION AND LASER ABLATION FROM VARIOUS PRECURSORS Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si) Gold carbides laser ablation synthesis and mass spectrometry Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates Thermal Desorption Spectroscopy Study on Diamond-like Carbon Coatings Mass spectrometry of nanodiamonds Limitations and possible improuvements of DLC dielectric response model based on parameterization of density of states Higher harmonic frequencies in capacitive discharges Higher harmonic frequencies in capacitive discharges Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage PREPARATION AND CHARACTERIZATION OF DLC:N FILMS Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen Laser ablation synthesis of new gold phosphides using red phosphorus and nanogold as precursors. Laser desorption ionisation time-of-flight mass spectrometry PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD Studium DLC vrstev na plastových substrátech Comparative Study on Hydrogenated and Deuterated Amorphous Carbon Films Deposited by RF PECVD Optimisation of mechanical properties of plasma deposited graded multilayer diamond-like carbon coatings Inﬂuence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation Measurement of mechanical properties of composite materials Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges Reaction of higher harmonic frequencies on thin films Diagnostics of reactive magnetron sputtering Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing Gold-diamond nanocomposite as a precursor for laser ablation synthesis of gold carbides The Performance of Amorphous Carbon Films with Silicon Content Deposited Using Low Pressure PECVD Deposition of Nanostructured Diamond-Like Carbon Films in Dual Frequency Capacitive Discharge Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Measurement of plasma potential waveform in capacitive discharge
is http://linked.open...vavai/cep/projekt of	http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2007/ico%3A00177016 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2007/ico%3A61389005 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2007/ico%3A68081731 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2007/orjk%3A14310 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2008/ico%3A00177016 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2008/ico%3A61389005 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2008/ico%3A68081731 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2008/orjk%3A14310 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/GA202%2F07%2F1669/2009/ico%3A00177016

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