About: Higher harmonic frequencies in capacitive discharges

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The contribution deals with higher harmonic frequencies that are produced in capacitively coupled discharges due to the nonlinearity of sheaths. Higher harmonics are strong especially at low pressure and they can have a significant influence on plasma. Moreover, they are a tool for plasma diagnostics and monitoring. In this work, dependence of amplitudes of higher harmonics on plasma parameters is studied experimentally. Decrease of pressure causes resonant amplification of harmonics probably related to the series plasma-sheath resonance. Similarly, decrease of electron concentration lead to a resonant amplification. Further, effects of RF power and state of the matching unit were compared. Finally, it was shown that harmonics sensitively react on presence of a deposited film which makes them suitable for monitoring purposes. The contribution deals with higher harmonic frequencies that are produced in capacitively coupled discharges due to the nonlinearity of sheaths. Higher harmonics are strong especially at low pressure and they can have a significant influence on plasma. Moreover, they are a tool for plasma diagnostics and monitoring. In this work, dependence of amplitudes of higher harmonics on plasma parameters is studied experimentally. Decrease of pressure causes resonant amplification of harmonics probably related to the series plasma-sheath resonance. Similarly, decrease of electron concentration lead to a resonant amplification. Further, effects of RF power and state of the matching unit were compared. Finally, it was shown that harmonics sensitively react on presence of a deposited film which makes them suitable for monitoring purposes. (en)
Title	Higher harmonic frequencies in capacitive discharges Higher harmonic frequencies in capacitive discharges (en)
skos:prefLabel	Higher harmonic frequencies in capacitive discharges Higher harmonic frequencies in capacitive discharges (en)
skos:notation	RIV/00216224:14310/10:00045010!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/07/1669), P(GP202/08/P038), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Žemlička, Radek Vašina, Petr Buršíková, Vilma Dvořák, Pavel
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	261552
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/10:00045010
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	higher harmonic frequencies; plasma (en)
http://linked.open.../riv/klicoveSlovo	higher harmonic frequencies plasma
http://linked.open...ontrolniKodProRIV	[0525A3566E0B]
http://linked.open...v/mistoKonaniAkce	Paříž
http://linked.open...i/riv/mistoVydani	Paříž
http://linked.open...i/riv/nazevZdroje	Bulletin of the American Physical Society 55 (2010), CTP142
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Study of hybrid deposition process and its application for thin film deposition
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Dvořák, Pavel Vašina, Petr Žemlička, Radek
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0003-0503
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	CNRS
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Higher harmonic frequencies in capacitive discharges Higher harmonic frequencies in capacitive discharges Higher harmonic frequencies in capacitive discharges

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