About: Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under the assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parametrization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films st Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under the assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parametrization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films st (en)
Title	Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry (en)
skos:prefLabel	Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry (en)
skos:notation	RIV/00216305:26210/08:PU75019!RIV12-MSM-26210___
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/07/1669), S, Z(MSM0021622411), Z(MSM0021630518)
http://linked.open...iv/cisloPeriodika	4,5
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Ohlídal, Miloslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	384987
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/08:PU75019
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	CONSTANTS, DISPERSION (en)
http://linked.open.../riv/klicoveSlovo	CONSTANTS DISPERSION
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[F33AE432734A]
http://linked.open...i/riv/nazevZdroje	Diamond and Related Materials
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	17
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Nečas, David Ohlídal, Ivan Ohlídal, Miloslav
http://linked.open...ain/vavai/riv/wos	000256643300066
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Simulation modelling of mechatronics systems
issn	0925-9635
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

Faceted Search & Find service v1.16.116 as of Feb 22 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 81 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software