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Description
| - The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with higher content of Zr then Al produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate at relatively low value of the magnetron target power density, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering exhibit relatively high hardness, low effective Young's modulus, high elastic recovery and an enhanced resistance to cracking.
- The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with higher content of Zr then Al produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate at relatively low value of the magnetron target power density, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering exhibit relatively high hardness, low effective Young's modulus, high elastic recovery and an enhanced resistance to cracking. (en)
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Title
| - Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking
- Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking (en)
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skos:prefLabel
| - Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking
- Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking (en)
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skos:notation
| - RIV/49777513:23520/12:43896763!RIV13-MSM-23520___
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http://linked.open...avai/predkladatel
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(OC10045), Z(MSM4977751302)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/12:43896763
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Dual magnetron; DC pulsed reactive sputtering; Resistance to cracking; Mechanical properties; Optical properties; Two-phase oxide (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Čerstvý, Radomír
- Sklenka, Josef
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://bibframe.org/vocab/doi
| - 10.1016/j.surfcoat.2011.09.035
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http://localhost/t...ganizacniJednotka
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is http://linked.open...avai/riv/vysledek
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