About: Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers     Goto   Sponge   NotDistinct   Permalink

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  • Polished Silicon wafer with Advanced Epitaxial Layer (AEPI). Wafer diameter 200 mm. Localized Light Scatterers (LLS) 100% of Wafer - max. 30 Counts per wafer >0.30 um by laser scan, Localized Light Scatterers (LLS) 90% of Wafer - max. 20 Counts per wafer >0.30 um by laser scan, thickness variability max. 2%, resistivity variability max. 4%.
  • Polished Silicon wafer with Advanced Epitaxial Layer (AEPI). Wafer diameter 200 mm. Localized Light Scatterers (LLS) 100% of Wafer - max. 30 Counts per wafer >0.30 um by laser scan, Localized Light Scatterers (LLS) 90% of Wafer - max. 20 Counts per wafer >0.30 um by laser scan, thickness variability max. 2%, resistivity variability max. 4%. (en)
Title
  • Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers
  • Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers (en)
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  • Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers
  • Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers (en)
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  • RIV/26821532:_____/13:#0000057!RIV13-MPO-26821532
http://linked.open...avai/predkladatel
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  • P(FR-TI3/031)
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  • Cana max. 100USD/200 mm AEPI desku
http://linked.open...titaPredkladatele
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  • 75019
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  • RIV/26821532:_____/13:#0000057
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  • AEPIW814AXX
http://linked.open...riv/jazykVysledku
http://linked.open...vai/riv/kategorie
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  • Silicon wafer; Epitaxial layer; Epitaxial wafer; Thickness variability; Resistivity variability; Localized Light Scatterers (en)
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  • [463A2E08F329]
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http://linked.open...echnickeParametry
  • 200 mm AEPI, LLS 100% of wafer - max. 30 >0.30 um, LLS 90% of wafer - max. 20 >0.30 um, TTV AEPI max. 2%, RRV AEPI max. 4%.
http://linked.open...iv/tvurceVysledku
  • Kostelník, Petr
  • Šik, Jan
http://linked.open...avai/riv/vlastnik
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