About: Defect engineering during Czochralski crystal growth and silicon wafer manufacturing

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Defect engineering during Czochralski crystal growth and silicon wafer manufacturing Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.intechopen.com/books/modern-aspects-of-bulk-crystal-and-thin-film-preparation/defect-engineering-during-czochralski-crystal-growth-and-silicon-wafer-manufacturing
Description	Electronic devices and integrated circuits are fabricated on single-crystal silicon wafers which are produced from silicon crystals grown primarily by the Czochralski (CZ) technique. Various defects are formed in the growing crystal as well as in the wafers during their processing. This chapter deals with the topic of engineering of crystal defects in the technology of manufacturing silicon single crystals and silicon wafers for the electronic industry. A basic overview of crystal defects found in semiconductor-grade silicon is provided and mechanisms of their formation are introduced. The impact of crystal defects on the manufacturing and performance of electronic devices is outlined and some of the methods of defect analyses are described. Finally, the most important methods for control of defect formation are summarized. Electronic devices and integrated circuits are fabricated on single-crystal silicon wafers which are produced from silicon crystals grown primarily by the Czochralski (CZ) technique. Various defects are formed in the growing crystal as well as in the wafers during their processing. This chapter deals with the topic of engineering of crystal defects in the technology of manufacturing silicon single crystals and silicon wafers for the electronic industry. A basic overview of crystal defects found in semiconductor-grade silicon is provided and mechanisms of their formation are introduced. The impact of crystal defects on the manufacturing and performance of electronic devices is outlined and some of the methods of defect analyses are described. Finally, the most important methods for control of defect formation are summarized. (en)
Title	Defect engineering during Czochralski crystal growth and silicon wafer manufacturing Defect engineering during Czochralski crystal growth and silicon wafer manufacturing (en)
skos:prefLabel	Defect engineering during Czochralski crystal growth and silicon wafer manufacturing Defect engineering during Czochralski crystal growth and silicon wafer manufacturing (en)
skos:notation	RIV/26821532:_____/12:#0000041!RIV13-MPO-26821532
http://linked.open...avai/predkladatel	ON SEMICONDUCTOR CZECH REPUBLIC, s.r.o., právní nástupce
http://linked.open...avai/riv/aktivita	P S
http://linked.open...avai/riv/aktivity	P(FR-TI3/031), S
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Válek, Lukáš Šik, Jan
http://linked.open.../riv/druhVysledku	C - Kapitola v knize
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	ON SEMICONDUCTOR CZECH REPUBLIC, s.r.o.
http://linked.open...dnocenehoVysledku	129829
http://linked.open...ai/riv/idVysledku	RIV/26821532:_____/12:#0000041
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Silicon; Czochralski method; Crystal growth; Crystal defects; Silicon wafer; COP; MCZ (en)
http://linked.open.../riv/klicoveSlovo	Silicon Crystal growth Czochralski method COP Crystal defects MCZ Silicon wafer
http://linked.open...ontrolniKodProRIV	[1B53E7DCCE00]
http://linked.open...i/riv/mistoVydani	Rijeka, Croatia
http://linked.open...i/riv/nazevZdroje	Modern Aspects of Bulk Crystal and Thin Film Preparation
http://linked.open...in/vavai/riv/obor	JJ
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...v/pocetStranKnihy	608 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Research and Development of Technologies of Manufacturing of Novel Species of Silicon Wafers
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Válek, Lukáš Šik, Jan
number of pages	28 (xsd:int)
http://bibframe.org/vocab/doi	10.5772/29816
http://purl.org/ne...btex#hasPublisher	InTech
https://schema.org/isbn	978-953-307-610-2

Faceted Search & Find service v1.16.116 as of Feb 22 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software