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  • Amorfní DLC vrstvy s různým obsahem Si, O2 a N2 byly deponovány procesem PECVD. Vrstvy byly hodnoceny metodami RBS, ERDA, FTIR a XPS. Mechanické vlastnosti byly hodnoceny nanoindentační metodou. (cs)
  • Amorphous diamond-like carbon films (DLC) with various silicon, oxygen and nitrogen content were deposited by plasma enhanced chemical vapor deposition (PECVD) technique. A combination of RBS, ERDA, FTIR and XPS methods was used to study the films´ chemical composition and structure. The mechanical properties were studied using a depth sensing indentation technique.
  • Amorphous diamond-like carbon films (DLC) with various silicon, oxygen and nitrogen content were deposited by plasma enhanced chemical vapor deposition (PECVD) technique. A combination of RBS, ERDA, FTIR and XPS methods was used to study the films´ chemical composition and structure. The mechanical properties were studied using a depth sensing indentation technique. (en)
Title
  • Influence of silicon, oxygen and nitrogen admixtures upon the properties of plasma deposited amorphous diamond-like carbon coatings
  • Influence of silicon, oxygen and nitrogen admixtures upon the properties of plasma deposited amorphous diamond-like carbon coatings (en)
  • Vliv křemíku, kyslíku a dusíku na vlastnosti plazmou deponovaných amorfních DLC vrstev (cs)
skos:prefLabel
  • Influence of silicon, oxygen and nitrogen admixtures upon the properties of plasma deposited amorphous diamond-like carbon coatings
  • Influence of silicon, oxygen and nitrogen admixtures upon the properties of plasma deposited amorphous diamond-like carbon coatings (en)
  • Vliv křemíku, kyslíku a dusíku na vlastnosti plazmou deponovaných amorfních DLC vrstev (cs)
skos:notation
  • RIV/49777513:23520/06:00000486!RIV07-MSM-23520___
http://linked.open.../vavai/riv/strany
  • 232
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM4977751303)
http://linked.open...iv/cisloPeriodika
  • 0
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 479503
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/06:00000486
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • DLC; PECVD; RBS; ERDA; FTIR; XPS; nanoindentation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CA - Kanada
http://linked.open...ontrolniKodProRIV
  • [58329D73F31B]
http://linked.open...i/riv/nazevZdroje
  • Journal of Advanced Oxidation Technologies
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Dvořák, Pavel
  • Valtr, Miroslav
  • Bláhová, Olga
  • Peřina, Vratislav
  • Zajíčková, L.
  • Buršík, J.
  • Janča, J.
http://linked.open...n/vavai/riv/zamer
issn
  • 1203-8407
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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