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Description
  • Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 A degrees C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.
  • Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 A degrees C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure. (en)
Title
  • Annealing of laser patterned PMMA coated with gold and gallium
  • Annealing of laser patterned PMMA coated with gold and gallium (en)
skos:prefLabel
  • Annealing of laser patterned PMMA coated with gold and gallium
  • Annealing of laser patterned PMMA coated with gold and gallium (en)
skos:notation
  • RIV/68407700:21230/13:00206811!RIV14-MPO-21230___
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  • P(FR-TI3/797), P(GAP108/10/1106), P(GPP108/11/P840)
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  • 9
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  • 61292
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  • RIV/68407700:21230/13:00206811
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  • SPUTTER-DEPOSITION; GROWTH; FILMS (en)
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  • NL - Nizozemsko
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  • [1D4785951F13]
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  • Journal of materials science - materials in electronics
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  • 24
http://linked.open...iv/tvurceVysledku
  • Huttel, I.
  • Lyutakov, O.
  • Prajzler, Václav
  • Švorčík, V.
  • Tůma, J.
  • Kalachyova, Y.
http://linked.open...ain/vavai/riv/wos
  • 000323249800059
issn
  • 0957-4522
number of pages
http://bibframe.org/vocab/doi
  • 10.1007/s10854-013-1282-3
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  • 21230
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