About: Effect of air annealing on mechanical properties and structure of amorphous B4C films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Amorphous B4C films were prepared by magnetron sputtering of the hot-pressed B4C target in different regimes. Hardness, intrinsic stress and film structure were investigated in dependence on the annealing temperature in air.Changes in the film structure and composition were investigated by Raman spectroscopy,confocal microscopy, and electron probe microanalysis. It has been shown that an annealing at 500 °C for 1 h leads to stress reduction, slight thickness decrease and increase of film hardness. However already at 600 °C the film oxidation proceeds very intensively with formation of the phases of boron oxide and amorphous carbon in the surface layer. The thickness of the film decreases quickly. Amorphous B4C films were prepared by magnetron sputtering of the hot-pressed B4C target in different regimes. Hardness, intrinsic stress and film structure were investigated in dependence on the annealing temperature in air.Changes in the film structure and composition were investigated by Raman spectroscopy,confocal microscopy, and electron probe microanalysis. It has been shown that an annealing at 500 °C for 1 h leads to stress reduction, slight thickness decrease and increase of film hardness. However already at 600 °C the film oxidation proceeds very intensively with formation of the phases of boron oxide and amorphous carbon in the surface layer. The thickness of the film decreases quickly. (en)
Title	Effect of air annealing on mechanical properties and structure of amorphous B4C films Effect of air annealing on mechanical properties and structure of amorphous B4C films (en)
skos:prefLabel	Effect of air annealing on mechanical properties and structure of amorphous B4C films Effect of air annealing on mechanical properties and structure of amorphous B4C films (en)
skos:notation	RIV/68378271:_____/11:00363873!RIV12-AV0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1M06002), P(KAN301370701), Z(AV0Z10100520), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	16
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Čtvrtlík, Radim Boháč, Petr Vorlíček, Vladimír Kulykovskyy, Valeriy Jastrabík, Lubomír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	196166
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/11:00363873
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	amorphous B4C films; hardness; air annealing; Raman spectra; oxidation (en)
http://linked.open.../riv/klicoveSlovo	Raman spectra hardness oxidation air annealing amorphous B4C films
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[DBFE4B89B232]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical structures, detection systems and relevant technologies for low photon number applications Nanostructured Macroscopic Systems - Technology and Characterisation
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	205
http://linked.open...iv/tvurceVysledku	Jastrabík, Lubomír Boháč, Petr Kulykovskyy, Valeriy Lapšanská, H. Vorlíček, Vladimír Čtvrtlík, Radim
http://linked.open...ain/vavai/riv/wos	000290187700012
http://linked.open...n/vavai/riv/zamer	Specific effects in condensed systems with reduced dimension and broken symmetry Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0257-8972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2011.02.052
is http://linked.open...avai/riv/vysledek of	Effect of air annealing on mechanical properties and structure of amorphous B4C films Effect of air annealing on mechanical properties and structure of amorphous B4C films

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