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  • Optical properties of plasma laser-deposited Ba0.75Sr0.25TiO3 (BST) thin films have been investigated using variable angle spectroscopic ellipsometry (VASE) and near-normal spectroscopic reflectivity (NNSR) within a broad spectral range at room temperature. The samples prepared under various deposition conditions and the Si substrate coated with the structure SiO2/TiOx/Pt weremeasured. The Xray diffraction, atomic force microscopy and alpha step measurement were used for characterization of the samples. The platinum-coated Si substráte data were fitted as a semi-infinite medium using the Drude and Lorentz oscillators model. The structure model for optical characterization of the sample included not only the BST layers and substrate but also the intermix and surface roughness layers to achieve good agreement with experimental data. The substrate structure was modeled by a simple bulk with surface roughness.
  • Optical properties of plasma laser-deposited Ba0.75Sr0.25TiO3 (BST) thin films have been investigated using variable angle spectroscopic ellipsometry (VASE) and near-normal spectroscopic reflectivity (NNSR) within a broad spectral range at room temperature. The samples prepared under various deposition conditions and the Si substrate coated with the structure SiO2/TiOx/Pt weremeasured. The Xray diffraction, atomic force microscopy and alpha step measurement were used for characterization of the samples. The platinum-coated Si substráte data were fitted as a semi-infinite medium using the Drude and Lorentz oscillators model. The structure model for optical characterization of the sample included not only the BST layers and substrate but also the intermix and surface roughness layers to achieve good agreement with experimental data. The substrate structure was modeled by a simple bulk with surface roughness. (en)
Title
  • Optical study of BST films combining ellipsometry and reflectivity
  • Optical study of BST films combining ellipsometry and reflectivity (en)
skos:prefLabel
  • Optical study of BST films combining ellipsometry and reflectivity
  • Optical study of BST films combining ellipsometry and reflectivity (en)
skos:notation
  • RIV/68378271:_____/09:00340744!RIV10-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/07/0591), Z(AV0Z10100520)
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
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  • 331839
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  • RIV/68378271:_____/09:00340744
http://linked.open...riv/jazykVysledku
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  • BST thin films; optical properties (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [679EB3050FA1]
http://linked.open...i/riv/nazevZdroje
  • Applied Surface Science
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 255
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Železný, Vladimír
  • Daniš, S.
  • Chvostová, Dagmar
  • Pajasová, Libuše
  • Valvoda, V.
http://linked.open...ain/vavai/riv/wos
  • 000263865000039
http://linked.open...n/vavai/riv/zamer
issn
  • 0169-4332
number of pages
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