About: Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Mapování mechanického pnutí v tenkých křemíkových vrstvách bylo realizováno pro vrstvy nanesené na AFM křemíková raménka pomocí Ramanovské mikrospektroskopie dovolilo měnit napětí pomocí nanomanipulátorů. (cs) We have used plasma enhanced chemical vapor deposition (PECVD) to deposit silicon thin films (0.2–1 μm) with different crystallinity fractions on Nanosensors PtIr5 coated atomic force microscopy (AFM) cantilevers (450 x 50 x 2 μm3). Microscopic measurements of Raman scattering were used to map both internal stress and extrinsic stress induced in the films by bending the cantilevers using a nanomanipulator (Kleindiek Nanotechnik MM3A). Thanks to the excellent elasticity of the cantilevers, the films could be bent to curvature radii down to 300 lm. We observed the stress induced shift of the TO–LO phonon Raman band of more than 3 cm-1 for fully microcrystalline film corresponding to the stress 0.8 GPa. The shift of the similar film with amorphous structure was 2.5 cm-1. We have used plasma enhanced chemical vapor deposition (PECVD) to deposit silicon thin films (0.2–1 μm) with different crystallinity fractions on Nanosensors PtIr5 coated atomic force microscopy (AFM) cantilevers (450 x 50 x 2 μm3). Microscopic measurements of Raman scattering were used to map both internal stress and extrinsic stress induced in the films by bending the cantilevers using a nanomanipulator (Kleindiek Nanotechnik MM3A). Thanks to the excellent elasticity of the cantilevers, the films could be bent to curvature radii down to 300 lm. We observed the stress induced shift of the TO–LO phonon Raman band of more than 3 cm-1 for fully microcrystalline film corresponding to the stress 0.8 GPa. The shift of the similar film with amorphous structure was 2.5 cm-1. (en)
Title	Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy (en) Mapování mechanického pnutí v tenkých křemíkových vrstvách na křemíkových raménkách pomocí Ramanovské mikrospektroskopie (cs)
skos:prefLabel	Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy (en) Mapování mechanického pnutí v tenkých křemíkových vrstvách na křemíkových raménkách pomocí Ramanovské mikrospektroskopie (cs)
skos:notation	RIV/68378271:_____/08:00320383!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/05/H003), P(IAA1010316), P(IAA1010413), P(KAN400100701), P(KJB100100512), P(LC06040), P(LC510), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	19-25
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Fejfar, Antonín Ledinský, Martin Stuchlík, Jiří Mates, Tomáš Vetushka, Aliaksi Kočka, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	377743
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/08:00320383
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	silicon; solar cells; nanocrystals; photovoltaics; Raman scattering; mechanical stress relaxation (en)
http://linked.open.../riv/klicoveSlovo	Raman scattering photovoltaics mechanical stress relaxation nanocrystals silicon solar cells
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[0FC7174114DF]
http://linked.open...i/riv/nazevZdroje	Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Nanoscience and nanotechnology with scanning probe microscopes: from atomic processes to material properties Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Physics of complex condensed systems Structures for Nanophotonics and Nanoelectronics Microcrystalline and nanocrystalline semiconductors for photonics:Electronic processes on the scales of nanometers and femtoseconds Studies of ultrafast dynamics of free carriers in semiconductors by means of time resolved terahertz spectroscopy
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	354
http://linked.open...iv/tvurceVysledku	Ledinský, Martin Fejfar, Antonín Stuchlík, Jiří Kočka, Jan Vetushka, Aliaksi Mates, Tomáš
http://linked.open...ain/vavai/riv/wos	000256500400038
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0022-3093
number of pages	3 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy Mapping of mechanical stress in silicon thin films on silicon cantilevers by Raman microspectroscopy

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