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  • DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure
  • DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure (en)
Title
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge (en)
skos:prefLabel
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge (en)
skos:notation
  • RIV/68378271:_____/06:00097902!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/05/2242), P(GA202/06/0776), Z(AV0Z10100522), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
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http://linked.open...dnocenehoVysledku
  • 480368
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00097902
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; time resolved measurements; Langmuir probe (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [A4DC46CFD65F]
http://linked.open...i/riv/nazevZdroje
  • Czechoslovak Journal of Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 56
http://linked.open...iv/tvurceVysledku
  • Hubička, Zdeněk
  • Hippler, R.
  • Straňák, V.
  • Blažek, J.
  • Tichý, M.
  • Špatenka, P.
  • Adámek, P.
  • Wrehde, S.
http://linked.open...ain/vavai/riv/wos
  • 000241337100017
http://linked.open...n/vavai/riv/zamer
issn
  • 0011-4626
number of pages
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