About: Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.     Goto   Sponge   NotDistinct   Permalink

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Description
  • In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2.
  • In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2. (en)
Title
  • Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
  • Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering. (en)
skos:prefLabel
  • Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
  • Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering. (en)
skos:notation
  • RIV/68378271:_____/01:02010165!RIV/2003/AV0/A02003/N
http://linked.open.../vavai/riv/strany
  • 1076;1081
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/00/1592), P(ME 305), Z(AV0Z1010914), Z(MSM 210000021)
http://linked.open...iv/cisloPeriodika
  • N/A
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 681466
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/01:02010165
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • diamond-like carbon; - structure; - stress; hardness (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [A422E3352AB9]
http://linked.open...i/riv/nazevZdroje
  • Diamond and Related Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 10
http://linked.open...iv/tvurceVysledku
  • Jastrabík, Lubomír
  • Boháč, Petr
  • Vorlíček, Vladimír
  • Kulikovsky, V.
  • Franc, František
  • Deineka, Alexander
http://linked.open...n/vavai/riv/zamer
issn
  • 0925-9635
number of pages
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