About: Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We have developed a Scanning Low Energy Electron Microscope (SLEEM) based on the Cathode Lens (CL) principle. A resolution of 4.5 nm at 20 eV, 0.8 nm at 200 eV and 0.5 nm at 15 keV primary beam energy can nowadays be obtained in a commercially available instrument. One of the main advantages of operation at low energies is the decrease in the interaction volume from approximately 1 μιη at 10 keV to 10 nm at 100 eV. The material contrast can be optimised and the charging effect suppressed at a tailored electron energy. Wave-optical contrasts are also available beneath 50 eV. The specimen may be immersed in a strong magnetic field in addition to an electrostatic field in order to obtain a small spot size across the whole energy range. The same fields influence the signal trajectories, so we can choose which part of the angular and energy distributions of emitted electrons are to be collected. Certain arrangements provide strong crystallographic contrast. Imaging conditions have been tailored to various material types. Experiments have been performed in an experimental ultrahigh vacuum (UHV) SLEEM and in an XHR SEM Magellan 400L. We have developed a Scanning Low Energy Electron Microscope (SLEEM) based on the Cathode Lens (CL) principle. A resolution of 4.5 nm at 20 eV, 0.8 nm at 200 eV and 0.5 nm at 15 keV primary beam energy can nowadays be obtained in a commercially available instrument. One of the main advantages of operation at low energies is the decrease in the interaction volume from approximately 1 μιη at 10 keV to 10 nm at 100 eV. The material contrast can be optimised and the charging effect suppressed at a tailored electron energy. Wave-optical contrasts are also available beneath 50 eV. The specimen may be immersed in a strong magnetic field in addition to an electrostatic field in order to obtain a small spot size across the whole energy range. The same fields influence the signal trajectories, so we can choose which part of the angular and energy distributions of emitted electrons are to be collected. Certain arrangements provide strong crystallographic contrast. Imaging conditions have been tailored to various material types. Experiments have been performed in an experimental ultrahigh vacuum (UHV) SLEEM and in an XHR SEM Magellan 400L. (en)
Title	Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure (en)
skos:prefLabel	Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure (en)
skos:notation	RIV/68081731:_____/14:00436805!RIV15-TA0-68081731
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(LO1212), P(TE01020118)
http://linked.open...iv/cisloPeriodika	S3
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Mikmeková, Šárka Frank, Luděk Mikmeková, Eliška Pokorná, Zuzana
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	16078
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/14:00436805
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning low energy electron microscopy; contrast; cathode lens (en)
http://linked.open.../riv/klicoveSlovo	cathode lens scanning low energy electron microscopy contrast
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[6CDF1CB4999A]
http://linked.open...i/riv/nazevZdroje	Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	ALISI - Centre of advanced diagnostic methods and technologies Electron microscopy APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	20
http://linked.open...iv/tvurceVysledku	Mikmeková, Šárka Mikmeková, Eliška Müllerová, Ilona Frank, Luděk Pokorná, Zuzana
issn	1431-9276
number of pages	2 (xsd:int)
http://bibframe.org/vocab/doi	10.1017/S1431927614006011

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