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  • We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. One of the important limiting factors in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty traditionally compensated when the index is evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1xE-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
  • We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. One of the important limiting factors in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty traditionally compensated when the index is evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1xE-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. (en)
Title
  • Precision positioning with suppression of the influence of refractive index of air
  • Precision positioning with suppression of the influence of refractive index of air (en)
skos:prefLabel
  • Precision positioning with suppression of the influence of refractive index of air
  • Precision positioning with suppression of the influence of refractive index of air (en)
skos:notation
  • RIV/68081731:_____/13:00421238!RIV14-TA0-68081731
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 98498
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/13:00421238
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • nanometrology; refractometry; interferometry; refractive index; nanoscale (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [7835E2CAF150]
http://linked.open...v/mistoKonaniAkce
  • Munich
http://linked.open...i/riv/mistoVydani
  • Bellingham
http://linked.open...i/riv/nazevZdroje
  • Optical Measurement Systems for Industrial Inspection VIII (Proceedings of SPIE Vol. 8788)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buchta, Zdeněk
  • Hrabina, Jan
  • Lazar, Josef
  • Číp, Ondřej
  • Čížek, Martin
  • Řeřucha, Šimon
  • Oulehla, Jindřich
  • Mikel, Břetislav
  • Holá, Miroslava
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000323493700114
http://linked.open.../riv/zahajeniAkce
number of pages
http://bibframe.org/vocab/doi
  • 10.1117/12.2020529
http://purl.org/ne...btex#hasPublisher
  • SPIE
https://schema.org/isbn
  • 978-0-8194-9604-1
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