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  • A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
  • A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup. (en)
Title
  • Nanopositioning with detection of a standing wave
  • Nanopositioning with detection of a standing wave (en)
skos:prefLabel
  • Nanopositioning with detection of a standing wave
  • Nanopositioning with detection of a standing wave (en)
skos:notation
  • RIV/68081731:_____/13:00397861!RIV14-TA0-68081731
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(ED0017/01/01), P(EE2.4.31.0016), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat
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  • 90613
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/13:00397861
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Nanometrology; Nanopositioning; Fabry-Perot cavity; Standing wave; Interferometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [D2EA8E548AAD]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Ostrava
http://linked.open...i/riv/nazevZdroje
  • NANOCON 2013. 5th International Conference Proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hrabina, Jan
  • Lazar, Josef
  • Číp, Ondřej
  • Oulehla, Jindřich
  • Stuchlík, J.
  • Holá, Miroslava
  • Fejfar, A.
  • Kočka, J.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • TANGER Ltd
https://schema.org/isbn
  • 978-80-87294-44-4
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