About: Interferometric coordinates measurement sytem for local probe microscopy nanometrology

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. (en)
Title	Interferometric coordinates measurement sytem for local probe microscopy nanometrology Interferometric coordinates measurement sytem for local probe microscopy nanometrology (en)
skos:prefLabel	Interferometric coordinates measurement sytem for local probe microscopy nanometrology Interferometric coordinates measurement sytem for local probe microscopy nanometrology (en)
skos:notation	RIV/68081731:_____/13:00397860!RIV14-TA0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(EE2.4.31.0016), P(FR-TI2/705), P(GPP102/11/P820), P(TA01010995), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Šerý, Mojmír Holá, Miroslava
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	80736
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/13:00397860
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Nanometrology; Interferometry; Traceability; Local probe microscopy; Nanopositioning (en)
http://linked.open.../riv/klicoveSlovo	Traceability Local probe microscopy Nanopositioning Interferometry Nanometrology
http://linked.open...ontrolniKodProRIV	[FE914B25E0A6]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	NANOCON 2013. 5th International Conference Proceedings
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC *Non-contact optical measuring methods and systems for precise engineering APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Stabilized laser sources fro spectrometer calibration of optical communications. Interferometric measurement techniques for nanopositioning Advanced interferometric systems for measurement in nanotechnology MEDTECH - educational and research partner network in medicine, biomedicine and scientific instruments
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír Holá, Miroslava Klepetek, P.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2013-10-16 (xsd:date)
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	TANGER Ltd
https://schema.org/isbn	978-80-87294-44-4

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