About: Modified knife-edge method for current density distribution measurements in e-beam writers

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Modified knife-edge method for current density distribution measurements in e-beam writers Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern. In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern. (en)
Title	Modified knife-edge method for current density distribution measurements in e-beam writers Modified knife-edge method for current density distribution measurements in e-beam writers (en)
skos:prefLabel	Modified knife-edge method for current density distribution measurements in e-beam writers Modified knife-edge method for current density distribution measurements in e-beam writers (en)
skos:notation	RIV/68081731:_____/13:00397634!RIV14-TA0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(TE01020118)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Horáček, Miroslav Bok, Jan Kolařík, Vladimír Matějka, František Matějka, Milan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	89177
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/13:00397634
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	electron-beam; intensity distribution; aperture; detector; profile; size (en)
http://linked.open.../riv/klicoveSlovo	aperture profile electron-beam intensity distribution detector size
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[C1296A28A640]
http://linked.open...i/riv/nazevZdroje	Journal of Vacuum Science & Technology B
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Electron microscopy APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	31
http://linked.open...iv/tvurceVysledku	Horáček, Miroslav Matějka, Milan Bok, Jan Kolařík, Vladimír Matějka, František
http://linked.open...ain/vavai/riv/wos	000320130500054
issn	1071-1023
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1116/1.4802920

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 19 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software