About: Precision displacement interferometry with stabilization of wavelength on air

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 10'6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1 O'8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third represents a reference for stabilization of the wavelength of the laser source. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 10'6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1 O'8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third represents a reference for stabilization of the wavelength of the laser source. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. (en)
Title	Precision displacement interferometry with stabilization of wavelength on air Precision displacement interferometry with stabilization of wavelength on air (en)
skos:prefLabel	Precision displacement interferometry with stabilization of wavelength on air Precision displacement interferometry with stabilization of wavelength on air (en)
skos:notation	RIV/68081731:_____/12:00386128!RIV13-GA0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Hrabina, Jan Číp, Ondřej Lazar, Josef Holá, Miroslava
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	160950
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/12:00386128
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Refractometry; nanopositioning; interferometry; nanometrology (en)
http://linked.open.../riv/klicoveSlovo	interferometry nanometrology nanopositioning Refractometry
http://linked.open...ontrolniKodProRIV	[F43F669642BB]
http://linked.open...v/mistoKonaniAkce	Liberec
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	Optics and Measurement 2012. Proceedings of the International Conference
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Interferometer with full in-line compensation of the fluctuations of refractive index Interferometric measurement techniques for nanopositioning Advanced interferometric systems for measurement in nanotechnology
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Hrabina, Jan Lazar, Josef Číp, Ondřej Holá, Miroslava
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-10-16 (xsd:date)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Institute of Plasma Physics
https://schema.org/isbn	978-80-87026-02-1
is http://linked.open...avai/riv/vysledek of	Precision displacement interferometry with stabilization of wavelength on air

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