About: Differential interferometry with suppression of the influence of refractive index of air for nanometrology

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented. (en)
Title	Differential interferometry with suppression of the influence of refractive index of air for nanometrology Differential interferometry with suppression of the influence of refractive index of air for nanometrology (en)
skos:prefLabel	Differential interferometry with suppression of the influence of refractive index of air for nanometrology Differential interferometry with suppression of the influence of refractive index of air for nanometrology (en)
skos:notation	RIV/68081731:_____/12:00385783!RIV13-GA0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Hrabina, Jan Číp, Ondřej Lazar, Josef Holá, Miroslava
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	131264
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/12:00385783
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	refraktometry; nanopositioning; interferometry; nanometrology (en)
http://linked.open.../riv/klicoveSlovo	interferometry nanometrology nanopositioning refraktometry
http://linked.open...ontrolniKodProRIV	[9792F3D1DD9F]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	NANOCON 2012, 4th International Conference Proceedings
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Interferometer with full in-line compensation of the fluctuations of refractive index Interferometric measurement techniques for nanopositioning Advanced interferometric systems for measurement in nanotechnology
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Hrabina, Jan Lazar, Josef Číp, Ondřej Holá, Miroslava
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-10-23 (xsd:date)
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	TANGER Ltd
https://schema.org/isbn	978-80-87294-32-1
is http://linked.open...avai/riv/vysledek of	Differential interferometry with suppression of the influence of refractive index of air for nanometrology

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