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  • The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. The laser stabilization technique is described together with comparison of frequency stability.
  • The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. The laser stabilization technique is described together with comparison of frequency stability. (en)
Title
  • Laser source for interferometry in nanotechnology
  • Laser source for interferometry in nanotechnology (en)
skos:prefLabel
  • Laser source for interferometry in nanotechnology
  • Laser source for interferometry in nanotechnology (en)
skos:notation
  • RIV/68081731:_____/10:00352207!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 267949
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/10:00352207
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • atomic force microscopy; nanometrology; interferometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [B2500739D486]
http://linked.open...v/mistoKonaniAkce
  • Liptovsky Jan
http://linked.open...i/riv/mistoVydani
  • Bellingham
http://linked.open...i/riv/nazevZdroje
  • 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings of SPIE Vol. 7746)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hrabina, Jan
  • Lazar, Josef
  • Číp, Ondřej
  • Čížek, Martin
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • SPIE
https://schema.org/isbn
  • 978-0-8194-8236-5
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