About: Laser Source for Interferometry in Nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. We have decided for a frequency-doubled Nd:YAG laser with thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability. The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. We have decided for a frequency-doubled Nd:YAG laser with thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability. (en)
Title	Laser Source for Interferometry in Nanometrology Laser Source for Interferometry in Nanometrology (en)
skos:prefLabel	Laser Source for Interferometry in Nanometrology Laser Source for Interferometry in Nanometrology (en)
skos:notation	RIV/68081731:_____/10:00352194!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	267948
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352194
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanometrology; AFM microscopy; interferometry (en)
http://linked.open.../riv/klicoveSlovo	interferometry nanometrology AFM microscopy
http://linked.open...ontrolniKodProRIV	[D23414F77C48]
http://linked.open...v/mistoKonaniAkce	Ottawa
http://linked.open...i/riv/mistoVydani	Ottawa
http://linked.open...i/riv/nazevZdroje	Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Lazar, Josef Číp, Ondřej Čížek, Martin
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-08-04 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	International ASET
https://schema.org/isbn	978-0-9867183-0-4
is http://linked.open...avai/riv/vysledek of	Laser Source for Interferometry in Nanometrology

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