About: Electron beam induced current measurement on a specimen biased in a cathode lens

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level. The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level. (en)
Title	Electron beam induced current measurement on a specimen biased in a cathode lens Electron beam induced current measurement on a specimen biased in a cathode lens (en)
skos:prefLabel	Electron beam induced current measurement on a specimen biased in a cathode lens Electron beam induced current measurement on a specimen biased in a cathode lens (en)
skos:notation	RIV/68081731:_____/09:00335265!RIV10-AV0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100650803), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Zobač, Martin Horáček, Miroslav Vlček, Ivan
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	312848
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/09:00335265
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	elektron beam induced current; SEM; very low energy electrons; cathode lens; specimen bias (en)
http://linked.open.../riv/klicoveSlovo	SEM cathode lens very low energy electrons elektron beam induced current specimen bias
http://linked.open...ontrolniKodProRIV	[E8D7DFDBE83F]
http://linked.open...v/mistoKonaniAkce	Graz
http://linked.open...i/riv/mistoVydani	Graz
http://linked.open...i/riv/nazevZdroje	MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Coherent imaging of nanostructures in a low-energy scanning electron microscope with an area detector of electrons
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Horáček, Miroslav Vlček, Ivan Zobač, Martin
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-08-30 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Verlag der Technischen Universität
https://schema.org/isbn	978-3-85125-062-6
is http://linked.open...avai/riv/vysledek of	Electron beam induced current measurement on a specimen biased in a cathode lens Electron beam induced current measurement on a specimen biased in a cathode lens Electron beam induced current measurement on a specimen biased in a cathode lens Electron beam induced current measurement on a specimen biased in a cathode lens

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