About: Collection of secondary electrons in scanning electron microscopes

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Collection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are a standard side-attached secondary electron detector, in which only weak electrostatic and nearly no magnetic field influence the signal trajectories in the specimen vicinity, and the side-attached (lower) and upper detectors in an immersion system with weak electrostatic but strong magnetic field penetrating towards the specimen. The collection efficiency was calculated for all three detection systems and several working distances. The ability of detectors to attract secondary electron trajectories for various initial azimuthal and polar angles was calculated, too. Collection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are a standard side-attached secondary electron detector, in which only weak electrostatic and nearly no magnetic field influence the signal trajectories in the specimen vicinity, and the side-attached (lower) and upper detectors in an immersion system with weak electrostatic but strong magnetic field penetrating towards the specimen. The collection efficiency was calculated for all three detection systems and several working distances. The ability of detectors to attract secondary electron trajectories for various initial azimuthal and polar angles was calculated, too. (en)
Title	Collection of secondary electrons in scanning electron microscopes Collection of secondary electrons in scanning electron microscopes (en)
skos:prefLabel	Collection of secondary electrons in scanning electron microscopes Collection of secondary electrons in scanning electron microscopes (en)
skos:notation	RIV/68081731:_____/09:00333617!RIV10-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100650803), P(OE08012), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	307489
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/09:00333617
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	detection of electrons; magnetic lenses; secondary electrons; SEM (en)
http://linked.open.../riv/klicoveSlovo	SEM magnetic lenses secondary electrons detection of electrons
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[0F807D84648A]
http://linked.open...i/riv/nazevZdroje	Journal of Microscopy
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Contrast and detection in scanning electron microscopy Coherent imaging of nanostructures in a low-energy scanning electron microscope with an area detector of electrons
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	236
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Müllerová, Ilona
http://linked.open...ain/vavai/riv/wos	000271974200006
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0022-2720
number of pages	8 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Collection of secondary electrons in scanning electron microscopes Collection of secondary electrons in scanning electron microscopes Collection of secondary electrons in scanning electron microscopes Collection of secondary electrons in scanning electron microscopes

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