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Description
| - Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra.
- Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra. (en)
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Title
| - Mechanical properties and structure of amorphous and crystalline B4C films
- Mechanical properties and structure of amorphous and crystalline B4C films (en)
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skos:prefLabel
| - Mechanical properties and structure of amorphous and crystalline B4C films
- Mechanical properties and structure of amorphous and crystalline B4C films (en)
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skos:notation
| - RIV/61989592:15310/09:00010954!RIV10-AV0-15310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(KAN301370701), P(OC 097), Z(AV0Z10100520)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/61989592:15310/09:00010954
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Sputtering; Hardness; Elastic modulus; Boron carbide films (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - GB - Spojené království Velké Británie a Severního Irska
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Diamond & Related Materials
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Dejneka, A.
- Jastrabík, Lubomír
- Stranyánek, Martin
- Čtvrtlík, Radim
- Boháč, P.
- Vorlíček, V.
- Kulikovsky, V.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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is http://linked.open...avai/riv/vysledek
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