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  • In this paper, we describe results of our recent experiments on electric field assisted patterning of thin polymethylmethacrylate (PMMA) layers. Micro-sized patterns were created on thin PMMA films by the effect of external electric field, perpendicular to the film surface. The PMMA film, prepared by spin-coating onto Si or Si/SiO2 wafer, was heated to the fluid temperature (275°C) and a linear pattern was created by the effect of electric field produced by a strip electrode. The dependence of the form and size of the created patterns on the intensity of the electric field, exposure time and initial film thickness was examined. Wave guiding properties were analyzed by mode spectroscopy, optical losses were measured by dispersive method and the created patterns were analyzed by optical microscopy and profilometer.
  • In this paper, we describe results of our recent experiments on electric field assisted patterning of thin polymethylmethacrylate (PMMA) layers. Micro-sized patterns were created on thin PMMA films by the effect of external electric field, perpendicular to the film surface. The PMMA film, prepared by spin-coating onto Si or Si/SiO2 wafer, was heated to the fluid temperature (275°C) and a linear pattern was created by the effect of electric field produced by a strip electrode. The dependence of the form and size of the created patterns on the intensity of the electric field, exposure time and initial film thickness was examined. Wave guiding properties were analyzed by mode spectroscopy, optical losses were measured by dispersive method and the created patterns were analyzed by optical microscopy and profilometer. (en)
Title
  • Optical PMMA waveguides fabricated by modification of refractive index applying electric field
  • Optical PMMA waveguides fabricated by modification of refractive index applying electric field (en)
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  • Optical PMMA waveguides fabricated by modification of refractive index applying electric field
  • Optical PMMA waveguides fabricated by modification of refractive index applying electric field (en)
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  • RIV/60461373:22310/10:00023141!RIV11-MSM-22310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP102/09/P104), S, Z(MSM6840770014)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 277171
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  • RIV/60461373:22310/10:00023141
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  • Polymer; Waveguide (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [087C75E361CF]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
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  • EDS´10 IMAPS CS International Conference Proceedings
http://linked.open...in/vavai/riv/obor
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  • Lyutakov, Oleksiy
  • Tůma, Jiří
  • Švorčík, Václav
  • Jeřábek, Vítězslav
  • Prajzler, Václav
  • Špirková, Jarmila
  • Hüttel, Ivan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Vysoké učení technické v Brně
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  • 978-80-214-4138-5
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  • 22310
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