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  • The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements.
  • The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements. (en)
  • Práce přináší srovnávací studii TiO2 vrstev připravených mikrovlnným výbojem generovaným surfatronem ve směsí Ar-O2 a pulzním bariérovým výbojem generovaným ve směsi He-N2 za atmosférického tlaku. Byl studován vliv kalcinace na krystalovou strukturu vrstev. (cs)
Title
  • Deposition of thin TiOx layers using plasma sources of jet types
  • Deposition of thin TiOx layers using plasma sources of jet types (en)
  • Depozice tenkých TiOx vrstev pomocí tryskových zdrojů plazmatu (cs)
skos:prefLabel
  • Deposition of thin TiOx layers using plasma sources of jet types
  • Deposition of thin TiOx layers using plasma sources of jet types (en)
  • Depozice tenkých TiOx vrstev pomocí tryskových zdrojů plazmatu (cs)
skos:notation
  • RIV/60076658:12410/07:00008092!RIV08-GA0-12410___
http://linked.open.../vavai/riv/strany
  • 139-140
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/05/2242)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 416250
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  • RIV/60076658:12410/07:00008092
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  • TiOx; anatase; XRD; surfatron; RF nozzle (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [D37C19290D15]
http://linked.open...i/riv/mistoVydani
  • Bratislava
http://linked.open...i/riv/nazevZdroje
  • In: Matuška, J., Matějčík, S., Skalný, J.D. (ed.): Proceedings of SAPP XVI, 2007
http://linked.open...in/vavai/riv/obor
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http://linked.open...vavai/riv/projekt
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http://linked.open...iv/tvurceVysledku
  • Straňák, Vítězslav
  • Špatenka, Petr
  • Tichý, Milan
  • Hubička, Z.
  • Churpita, O.
  • Chichina, M.
  • Kment, S.
number of pages
http://purl.org/ne...btex#hasPublisher
  • Univerzita Komenského v Bratislave
https://schema.org/isbn
  • 978-80-89186-13-6
http://localhost/t...ganizacniJednotka
  • 12410
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