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Description
  • The article reports on the oxide nanocomposite coatings reactively sputtered by a pulsed dual magnetron and consists of two parts. The first part briefly describes main problems in the reactive sputtering of oxides. The second part is devoted to transparent oxide coatings. Two types of oxide coatings are described in detail. It is shown that coatings with relatively high hardness, low effective Young's modulus are highly elastic and exhibit an enhanced resistance to cracking.
  • The article reports on the oxide nanocomposite coatings reactively sputtered by a pulsed dual magnetron and consists of two parts. The first part briefly describes main problems in the reactive sputtering of oxides. The second part is devoted to transparent oxide coatings. Two types of oxide coatings are described in detail. It is shown that coatings with relatively high hardness, low effective Young's modulus are highly elastic and exhibit an enhanced resistance to cracking. (en)
Title
  • High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings
  • High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings (en)
skos:prefLabel
  • High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings
  • High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings (en)
skos:notation
  • RIV/49777513:23520/13:43915967!RIV14-MSM-23520___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
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  • P(GAP108/12/0393), Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika
  • January
http://linked.open...vai/riv/dodaniDat
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  • 77424
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  • RIV/49777513:23520/13:43915967
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  • Toughness; Oxidation resistance; Thermal stability; Nanocomposite coatings; Dual magnetron; Reactive magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [E4BCCD93499A]
http://linked.open...i/riv/nazevZdroje
  • Vacuum
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  • 87
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Baroch, Pavel
http://linked.open...n/vavai/riv/zamer
issn
  • 0042-207X
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.vacuum.2012.02.023
http://localhost/t...ganizacniJednotka
  • 23520
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