About: Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Thermal stability of deposited Si-B-C-N materials (film fragments or powders without a substrate) in inert gases (He and Ar) up to 1700 °C was investigated using differential scanning calorimetry, high-resolution thermogravimetry and X-ray diffraction measurements. Amorphous Si-B-C-N films were fabricated by dc magnetron co-sputtering of a single B4C-Si target in two nitrogen-argon gas mixtures (50% N2 + 50% Ar or 25% N2 + 75% Ar). It was found that the deposited Si-B-C-N materials can be more stable at high temperatures in the inert atmosphere than the usually used substrates (e.g. SiC or BN). The materials with the compositions (in at.%) Si32-33B10C2N50-51, for which N/(Si+B+C)=1.1-1.2, retained their amorphous structure up to 1600 °C without any structural transformations and detectable mass changes. Thermal stability of deposited Si-B-C-N materials (film fragments or powders without a substrate) in inert gases (He and Ar) up to 1700 °C was investigated using differential scanning calorimetry, high-resolution thermogravimetry and X-ray diffraction measurements. Amorphous Si-B-C-N films were fabricated by dc magnetron co-sputtering of a single B4C-Si target in two nitrogen-argon gas mixtures (50% N2 + 50% Ar or 25% N2 + 75% Ar). It was found that the deposited Si-B-C-N materials can be more stable at high temperatures in the inert atmosphere than the usually used substrates (e.g. SiC or BN). The materials with the compositions (in at.%) Si32-33B10C2N50-51, for which N/(Si+B+C)=1.1-1.2, retained their amorphous structure up to 1600 °C without any structural transformations and detectable mass changes. (en)
Title	Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C (en)
skos:prefLabel	Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C (en)
skos:notation	RIV/49777513:23520/10:00503542!RIV11-MSM-23520___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Zeman, Petr Čapek, Jiří Vlček, Jaroslav Čerstvý, Radomír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	292743
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/10:00503542
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Si-B-C-N films; thin films; thermal stability; differential scanning calorimetry; thermogravimetry; X-ray diffraction; reactive sputtering (en)
http://linked.open.../riv/klicoveSlovo	reactive sputtering X-ray diffraction thermal stability differential scanning calorimetry thermogravimetry thin films Si-B-C-N films
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[001976E6FE9F]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	519
http://linked.open...iv/tvurceVysledku	Zeman, Petr Vlček, Jaroslav Čerstvý, Radomír Čapek, Jiří
http://linked.open...ain/vavai/riv/wos	000283955200054
http://linked.open...n/vavai/riv/zamer	Procesy ve výbojovém plazmatu a nové tenkovrstvé materiály s unikátními vlastnostmi
issn	0040-6090
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23520
is http://linked.open...avai/riv/vysledek of	Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700 °C

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