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  • We report on the results obtained using time-resolved Langmuir probe measurements in high-power pulsed dc magnetron sputtering discharges. Time evolutions of the electron energy distribution and the local plasma parameters were investigated at a substrate position of 100mm from a planar target of 100mm diameter during a high-rate deposition of copper films. High plasma densities were achieved and the electron energy distributions with two energy groups and sharply truncated high-energy tails were observed.
  • We report on the results obtained using time-resolved Langmuir probe measurements in high-power pulsed dc magnetron sputtering discharges. Time evolutions of the electron energy distribution and the local plasma parameters were investigated at a substrate position of 100mm from a planar target of 100mm diameter during a high-rate deposition of copper films. High plasma densities were achieved and the electron energy distributions with two energy groups and sharply truncated high-energy tails were observed. (en)
Title
  • Electron energy distributions and plasma parameters in high-power pulsed magnetron sputtering discharges
  • Electron energy distributions and plasma parameters in high-power pulsed magnetron sputtering discharges (en)
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  • Electron energy distributions and plasma parameters in high-power pulsed magnetron sputtering discharges
  • Electron energy distributions and plasma parameters in high-power pulsed magnetron sputtering discharges (en)
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  • RIV/49777513:23520/09:00501523!RIV10-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • Z(MSM4977751302)
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  • 2
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  • 312858
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  • RIV/49777513:23520/09:00501523
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  • high-power pulsed sputtering; magnetron discharges; Langmuir probe diagnostics; electron energy distributions; Electron temperatures; Plasma densities (en)
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  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [996D59005564]
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  • Plasma Sources Science and Technology
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  • 18
http://linked.open...iv/tvurceVysledku
  • Pajdarová, Andrea Dag
  • Vlček, Jaroslav
  • Lukáš, Jan
  • Kudláček, Pavel
http://linked.open...ain/vavai/riv/wos
  • 000265580800011
http://linked.open...n/vavai/riv/zamer
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  • 0963-0252
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  • 23520
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