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  • Novel quaternary Si-B-C-N materials are becoming increasingly attractive because of their possible high-temperature and harsh-environment applications. In the present work, amorphous Si-B-C-N films were deposited on Si and SiC substrates by reactive dc magnetron co-sputtering using a single C-Si-B or B4C-Si target in nitrogen-argon gas mixtures. Films deposited under optimized conditions (B4C-Si target, 50% N2 + 50% Ar gas mixture) exhibited extremely high oxidation resistance in air at elevated temperatures (even above 1500°C). Formation of protective surface layers (mainly composed of Si and O) was proved by high-resolution transmission electron microscopy (HRTEM), Rutheford backscattering spectrometry (RBS) and X-ray diffraction (XRD) measurements after oxidization.
  • Novel quaternary Si-B-C-N materials are becoming increasingly attractive because of their possible high-temperature and harsh-environment applications. In the present work, amorphous Si-B-C-N films were deposited on Si and SiC substrates by reactive dc magnetron co-sputtering using a single C-Si-B or B4C-Si target in nitrogen-argon gas mixtures. Films deposited under optimized conditions (B4C-Si target, 50% N2 + 50% Ar gas mixture) exhibited extremely high oxidation resistance in air at elevated temperatures (even above 1500°C). Formation of protective surface layers (mainly composed of Si and O) was proved by high-resolution transmission electron microscopy (HRTEM), Rutheford backscattering spectrometry (RBS) and X-ray diffraction (XRD) measurements after oxidization. (en)
  • Nové materiály kvaternárního systému Si-B-C-N jsou velmi zajímavé pro jejich možné využití za vysokých teplot a v agresivním prostředí. V této práci byly připraveny vrstvy Si-B-C-N na substráty Si a SiC za použití reaktivního dc magnetronového naprašování z terčů C-Si-B a B4C-Si v dusíko-argonové plynné směsi. Vrstvy připravené za optimalizovaných podmínek (terč B4C-Si, plynná směs 50% N2 + 50% Ar) vykazovaly extrémně vysokou oxidační odolnost ve vzduchu při zvýšených teplotách (dokonce nad 1500°C). Vytváření ochranných povrchových vrstev (skládajících se převážně z Si a O) během oxidace bylo potvrzeno pomocí transmisního elektronového mikroskopu s vysokým rozlišením (HRTEM), analýzy pružně rozptýlených nabitých částic (RBS) a rentgenové difrakce. (cs)
Title
  • Hard Amorphous Si-B-C-N Films with Ultra-High Thermal Stability in Air
  • Hard Amorphous Si-B-C-N Films with Ultra-High Thermal Stability in Air (en)
  • Tvrdé amorfní vrstvy Si-B-C-N s ultravysokou teplotní stabilitou ve vzduchu (cs)
skos:prefLabel
  • Hard Amorphous Si-B-C-N Films with Ultra-High Thermal Stability in Air
  • Hard Amorphous Si-B-C-N Films with Ultra-High Thermal Stability in Air (en)
  • Tvrdé amorfní vrstvy Si-B-C-N s ultravysokou teplotní stabilitou ve vzduchu (cs)
skos:notation
  • RIV/49777513:23520/08:00501289!RIV09-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • Z(MSM4977751302)
http://linked.open...vai/riv/dodaniDat
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  • 369801
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/08:00501289
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  • Si-B-C-N films; magnetron sputtering; oxidation resistance; thermal stability (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [ABC5705C41E9]
http://linked.open...v/mistoKonaniAkce
  • Chicago
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  • Chicago
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  • Technical Conference Proceedings
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http://linked.open...iv/tvurceVysledku
  • Zeman, Petr
  • Vlček, Jaroslav
  • Čerstvý, Radomír
  • Čapek, Jiří
  • Hřeben, Stanislav
  • Kalaš, Jiří
http://linked.open...vavai/riv/typAkce
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http://linked.open...n/vavai/riv/zamer
issn
  • 0737-5921
number of pages
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  • Society of Vacuum Coaters
http://localhost/t...ganizacniJednotka
  • 23520
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