About: Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si-B-C-N coatings     Goto   Sponge   NotDistinct   Permalink

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  • The effect of the gas mixture composition on the high-temperature behavior of amorphous Si-B-C-N coatings was systematically investigated up to 1700 °C in a flowing air and inert gases. The Si-B-C-N coatings were deposited by reactive dc magnetron co-sputtering using a single B4C-Si target in two nitrogen-argon gas mixtures (50% N2+50% Ar or 25% N2+75% Ar). It was found that the Ar fraction in the gas mixture determines an important N/(Si+B+C) concentration ratio in the coatings, and hence their high-temperature behavior. The coating prepared with a 50% Ar fraction exhibits extremely high oxidation resistance up to 1400 °C and very high oxidation resistance up to 1600 °C in air, and extremely high thermal stability up to 1600 °C in inert gases.
  • The effect of the gas mixture composition on the high-temperature behavior of amorphous Si-B-C-N coatings was systematically investigated up to 1700 °C in a flowing air and inert gases. The Si-B-C-N coatings were deposited by reactive dc magnetron co-sputtering using a single B4C-Si target in two nitrogen-argon gas mixtures (50% N2+50% Ar or 25% N2+75% Ar). It was found that the Ar fraction in the gas mixture determines an important N/(Si+B+C) concentration ratio in the coatings, and hence their high-temperature behavior. The coating prepared with a 50% Ar fraction exhibits extremely high oxidation resistance up to 1400 °C and very high oxidation resistance up to 1600 °C in air, and extremely high thermal stability up to 1600 °C in inert gases. (en)
  • Práce se zabývá vyšetřováním vlivu složení plynné směsi na vysokoteplotní chování amorfních vrstev Si-B-C-N do teploty 1700 °C v proudícím vzduchu a inertních plynech. Vrstvy Si-B-C-N byly připraveny metodou magnetronového rozprašování z terče B4C-Si ve dvou dusíko-argonových plynných směsích (50% N2+50% Ar or 25% N2+75% Ar). Bylo zjištěno, že podíl argonu v plynné směsi určuje důležitý koncentrační poměr N/(Si+B+C) ve vrstvě a tím i vysokoteplotní chování této vrstvy. Vrstvy připravené s 50% argonovým podílem v plynné směsi vykazovaly extrémně vysokou oxidační odolnost do 1400 °C a velmi vysokou oxidační odolnost do teploty 1600 °C ve vzduchu a extrémně vysokou teplotní stabilitu do teploty 1600 °C v inertní atmosféře. (cs)
Title
  • Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si-B-C-N coatings
  • Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si-B-C-N coatings (en)
  • Vliv složení plynné směsi na vysokoteplotní chování vrstev systému Si-B-C-N (cs)
skos:prefLabel
  • Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si-B-C-N coatings
  • Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si-B-C-N coatings (en)
  • Vliv složení plynné směsi na vysokoteplotní chování vrstev systému Si-B-C-N (cs)
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  • RIV/49777513:23520/08:00500721!RIV09-MSM-23520___
http://linked.open...avai/riv/aktivita
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  • Z(MSM4977751302)
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  • 203
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  • 365290
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  • RIV/49777513:23520/08:00500721
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  • Coatings; Si-B-C-N; Oxidation resistance; Thermal stability (en)
http://linked.open.../riv/klicoveSlovo
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  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [99F9B413E6A3]
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  • Surface and Coatings Technology
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  • 0
http://linked.open...iv/tvurceVysledku
  • Houška, Jiří
  • Zeman, Petr
  • Vlček, Jaroslav
  • Čerstvý, Radomír
  • Čapek, Jiří
  • Hřeben, Stanislav
http://linked.open...ain/vavai/riv/wos
  • 000261654100014
http://linked.open...n/vavai/riv/zamer
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  • 0257-8972
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  • 23520
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