About: Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Metodou reaktivního magnetronového naprašování byly připraveny vrstvy systému Si-B-C-N. Práce se zaměřuje na hledání vztahů mezi procesními parametry, prvkovým složením, vazebnou strukturou a mechanickými, tribologickými a optickými vlastnostmi připravených materiálů. Vrstvy vykazují vysokou tvrdost (do 36 GPa), dobrou adhezi k substrátu Si(100) při nízkém tlakovém pnutí (1.0-1.6 GPa), index lomu od 1.8 do 2.2 (při 550 nm) a extinkční koeficient od 2 x 10%224 do 0.3. Díky těmto vlastnostem jsou vrstvy Si-B-C-N vhodné pro použití v tribologických a optoelektronických aplikacích. (cs) Quaternary Si-B-C-N films were prepared using reactive direct current magnetron co-sputtering. We focused on complex relationships between process parameters, elemental composition, bonding structure, and mechanical, tribological and optical properties of the deposited materials. The films exhibit a high hardness (up to 36 GPa) and a good adhesion to Si(100) substrates at a low compressive stress (1.0-1.6 GPa), refractive index ranging from 1.8 to 2.2 (at 550 nm) and an extinction coefficient between 2 x 10%224 and 0.3. The Si-B-C-N films appear attractive for both tribological and optoelectronic applications. Quaternary Si-B-C-N films were prepared using reactive direct current magnetron co-sputtering. We focused on complex relationships between process parameters, elemental composition, bonding structure, and mechanical, tribological and optical properties of the deposited materials. The films exhibit a high hardness (up to 36 GPa) and a good adhesion to Si(100) substrates at a low compressive stress (1.0-1.6 GPa), refractive index ranging from 1.8 to 2.2 (at 550 nm) and an extinction coefficient between 2 x 10%224 and 0.3. The Si-B-C-N films appear attractive for both tribological and optoelectronic applications. (en)
Title	Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering (en) Mechanické a optické vlastnosti vrstev kvaternárního systému Si-B-C-N (cs)
skos:prefLabel	Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering (en) Mechanické a optické vlastnosti vrstev kvaternárního systému Si-B-C-N (cs)
skos:notation	RIV/49777513:23520/08:00500501!RIV09-MSM-23520___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika	21
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Soukup, Zbyněk Čížek, Jiří Houška, Jiří Vlček, Jaroslav Potocký, Štěpán Kalaš, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	378233
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/08:00500501
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Si-B-C-N films; Magnetron sputtering; Elemental composition; Bonding structure; Tribological and optical properties; Hardness; Stress (en)
http://linked.open.../riv/klicoveSlovo	Stress Magnetron sputtering Bonding structure Hardness Si-B-C-N films Elemental composition Tribological and optical properties
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[A899E14624F6]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	516
http://linked.open...iv/tvurceVysledku	Houška, Jiří Vlček, Jaroslav Potocký, Štěpán Čížek, Jiří Martinů, Ludvík Soukup, Zbyněk Kalaš, Jiří Jedrzejowski, P. Klemberg-Sapieha, J. E.
http://linked.open...ain/vavai/riv/wos	000259727900004
http://linked.open...n/vavai/riv/zamer	Procesy ve výbojovém plazmatu a nové tenkovrstvé materiály s unikátními vlastnostmi
issn	0040-6090
number of pages	8 (xsd:int)
http://localhost/t...ganizacniJednotka	23520
is http://linked.open...avai/riv/vysledek of	Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering

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