About: Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Studie se věnuje nové skupině amorfních nanokompozitních povlaků a-Si3N4/MeNx s vysokým (>50 obj.%) obsahem fáze Si3N4 (Me=Zr, Ta, Mo a W). Tyto nanokompozity vykazují vysokou (>1000°C) teplotní stabilitu zabraňující krystalizaci a vysokou (>1000°C) oxidační odolnost v případě, že je kov Me zabudovaný do nanokompozitu vhodně zvolený. Bylo zjištěno, že vrstva Zr-Si-N deponovaná na substrát Si(100) nevykazuje žádný nárůst hmotnosti (Δm=0) během termogravimetrického měření provedeného v tekoucím vzduchu až do teploty 1300°C, tj. až do teplotního limitu substrátu Si, což není teplotní limit nanokompozitu. (cs) This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite. This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite. (en)
Title	Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance (en) Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností (cs)
skos:prefLabel	Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance (en) Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností (cs)
skos:notation	RIV/49777513:23520/07:00000335!RIV08-MSM-23520___
http://linked.open.../vavai/riv/strany	31
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika	0
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Zeman, Petr Musil, Jindřich
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	423806
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/07:00000335
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	a-Si3N4/MeNx composites; structure; surface morphology; mechanical properties; oxidation resistance; DC reactive magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo	surface morphology mechanical properties structure oxidation resistance DC reactive magnetron sputtering a-Si3N4/MeNx composites
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[DDB50629CA99]
http://linked.open...i/riv/nazevZdroje	Solid State Phenomena
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Musil, Jindřich Zeman, Petr
http://linked.open...n/vavai/riv/zamer	Procesy ve výbojovém plazmatu a nové tenkovrstvé materiály s unikátními vlastnostmi
issn	1012-0394
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23520
is http://linked.open...avai/riv/vysledek of	Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 47 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software