About: Negatively Charged Al2O3 Layers Deposited by Magnetron Sputteringand Vacuum Evaporation for Crystalline Silicon Solar Cell BSF

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.eupvsec-proceedings.com/proceedings?paper=14571
Description	The main goal of our work is utilization of very known vacuum technologies as magnetron sputtering and vacuum evaporation for transfer of the aluminum oxide (Al2O3) deposition process from ALD technique to the industrial sputtering system with the aim to implement high quality back surface field passivation into a large and effective deposition system in the technology processes of Solartec company. The passivation effect is tested by MW-PCD (Microwave Photoconductance Decay) measuring method with deposition of identical passivation layers on the both sides of Czochralski (CZ) p and n-type substrates. The main goal of our work is utilization of very known vacuum technologies as magnetron sputtering and vacuum evaporation for transfer of the aluminum oxide (Al2O3) deposition process from ALD technique to the industrial sputtering system with the aim to implement high quality back surface field passivation into a large and effective deposition system in the technology processes of Solartec company. The passivation effect is tested by MW-PCD (Microwave Photoconductance Decay) measuring method with deposition of identical passivation layers on the both sides of Czochralski (CZ) p and n-type substrates. (en)
Title	Negatively Charged Al2O3 Layers Deposited by Magnetron Sputteringand Vacuum Evaporation for Crystalline Silicon Solar Cell BSF Negatively Charged Al2O3 Layers Deposited by Magnetron Sputteringand Vacuum Evaporation for Crystalline Silicon Solar Cell BSF (en)
skos:prefLabel	Negatively Charged Al2O3 Layers Deposited by Magnetron Sputteringand Vacuum Evaporation for Crystalline Silicon Solar Cell BSF Negatively Charged Al2O3 Layers Deposited by Magnetron Sputteringand Vacuum Evaporation for Crystalline Silicon Solar Cell BSF (en)
skos:notation	RIV/45309787:_____/11:#0000011!RIV14-MPO-45309787
http://linked.open...avai/predkladatel	HVM PLASMA, spol. s r.o.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(FR-TI1/603), Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Vyskočil, Jiří Kadlec, Stanislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	HVM PLASMA, spol. s r.o.
http://linked.open...dnocenehoVysledku	215304
http://linked.open...ai/riv/idVysledku	RIV/45309787:_____/11:#0000011
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	magnetron sputtering; solar cell (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering solar cell
http://linked.open...ontrolniKodProRIV	[7BB560809F6A]
http://linked.open...v/mistoKonaniAkce	Hamburg
http://linked.open...i/riv/mistoVydani	Hamburg
http://linked.open...i/riv/nazevZdroje	26th European Photovoltaic Solar Energy Conference and Exhibition
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Effective coating technology of thin passivation and antireflection layers for production of crystalline solar cells
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Bařinka, Radim Poruba, Aleš Čech, Pavel Vyskočil, Jiří Oulehla, Jindřich Kadlec, Stanislav Hégr, Ondřej
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2011-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
number of pages	3 (xsd:int)
http://bibframe.org/vocab/doi	10.4229/26thEUPVSEC2011-2BV.3.65
http://purl.org/ne...btex#hasPublisher	26th European Photovoltaic Solar Energy Conference and Exhibition
https://schema.org/isbn	3-936338-27-2

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