About: Enhanced Oxygen Precipitation during the Czochralski Crystal Growth     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • An unusual pattern of the Oxidation Induced Stacking Faults (OISF) in the heavily boron-doped silicon is reported. Instead of the commonly reported simple OISF ring, we observe a banded OISF pattern. The pattern reflects the distribution of residual vacancies as it is described by Voronkov and Falster [J. Crystal Growth 204 (1999) 462]. We show that the oxygen precipitates in the L- and H- bands grow to an abnormally large size during the crystal growth and which serve as the OISF nuclei during subsequent wafer oxidation. It is concluded that a combination of the high boron, oxygen and vacancy concentration is responsible for the enhanced oxygen precipitation during the crystal growth.
  • An unusual pattern of the Oxidation Induced Stacking Faults (OISF) in the heavily boron-doped silicon is reported. Instead of the commonly reported simple OISF ring, we observe a banded OISF pattern. The pattern reflects the distribution of residual vacancies as it is described by Voronkov and Falster [J. Crystal Growth 204 (1999) 462]. We show that the oxygen precipitates in the L- and H- bands grow to an abnormally large size during the crystal growth and which serve as the OISF nuclei during subsequent wafer oxidation. It is concluded that a combination of the high boron, oxygen and vacancy concentration is responsible for the enhanced oxygen precipitation during the crystal growth. (en)
  • Předmětem studia byl neobvyklý charakter Oxidation Induced Stacking Faults (OISF - oxidací vyvolané vrstevné chyby) v křemíku silně legovaném bórem. Místo běžně uváděného jednoduchého OISF ringu jsme pozoroval OISF ring s pásovou strukturou. Pásy odpovídají rozložení zbytkových vakancí (oronkov and Falster [J. Crystal Growth 204 (1999) 462]). Ukazujeme, že kyslíkové precipitáty v L a H pásu rostou v abnormálních velikostech a tvoří zárodky OISF během následující oxidace křemíkové desky. Dokázali jsme, že kombinace vysoké koncentrace bóru, kyslíku a vakancí vyvolává zvýšenou precipitaci kyslíku během růstu krystalů. (cs)
Title
  • Zvýšená precipitace kyslíku při Czochralskiho tažení krystalů (cs)
  • Enhanced Oxygen Precipitation during the Czochralski Crystal Growth
  • Enhanced Oxygen Precipitation during the Czochralski Crystal Growth (en)
skos:prefLabel
  • Zvýšená precipitace kyslíku při Czochralskiho tažení krystalů (cs)
  • Enhanced Oxygen Precipitation during the Czochralski Crystal Growth
  • Enhanced Oxygen Precipitation during the Czochralski Crystal Growth (en)
skos:notation
  • RIV/26821532:_____/08:#0000003!RIV08-MPO-26821532
http://linked.open.../vavai/riv/strany
  • 167-173
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(FI-IM2/131)
http://linked.open...iv/cisloPeriodika
  • 131-133
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 366248
http://linked.open...ai/riv/idVysledku
  • RIV/26821532:_____/08:#0000003
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Silicon, defects, boron, oxygen, precipitation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [F506FC4F612E]
http://linked.open...i/riv/nazevZdroje
  • Solid State Phenomena
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2008
http://linked.open...iv/tvurceVysledku
  • Válek, Lukáš
  • Šik, Jan
issn
  • 1012-0394
number of pages
Faceted Search & Find service v1.16.116 as of Feb 22 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software