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Description
  • Výsledky počítačových simulací teplotního pole přechodových jevů během CZ růstu křemíku - procesu tavení vsádky polykrystalického křemíku. (cs)
  • We present TD simulations of the early stage of polysilicon charge melting, which has not been reported before. First, steady-state temperature field is modeled with the heater power of 0 kW. These results are used as an initial condition for TD simulation. In the next time step, heater power is increased to 100 kW. Further simulations are performed with the time step of 6 min and constant heater power. TD simulation proceeds until melting temperature is reached in the polysilicon charge. Further simulation of melting is not possible at present simulation level.
  • We present TD simulations of the early stage of polysilicon charge melting, which has not been reported before. First, steady-state temperature field is modeled with the heater power of 0 kW. These results are used as an initial condition for TD simulation. In the next time step, heater power is increased to 100 kW. Further simulations are performed with the time step of 6 min and constant heater power. TD simulation proceeds until melting temperature is reached in the polysilicon charge. Further simulation of melting is not possible at present simulation level. (en)
Title
  • Simulace přechodových jevů během CZ růstu křemíku (cs)
  • Simulations of transient effects during CZ silicon growth
  • Simulations of transient effects during CZ silicon growth (en)
skos:prefLabel
  • Simulace přechodových jevů během CZ růstu křemíku (cs)
  • Simulations of transient effects during CZ silicon growth
  • Simulations of transient effects during CZ silicon growth (en)
skos:notation
  • RIV/26821532:_____/06:#0000008!RIV08-MPO-26821532
http://linked.open.../vavai/riv/strany
  • 75-76
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(FI-IM2/131)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 499440
http://linked.open...ai/riv/idVysledku
  • RIV/26821532:_____/06:#0000008
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Silicon, Czochralski, crystal, charge, FEMAG, simulation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [783543F6EEA7]
http://linked.open...v/mistoKonaniAkce
  • Valtice
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 16th Joint Seminar Development of Materials Science in Research and Education
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Lorenc, Michal
  • Válek, Lukáš
  • Šik, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czech and Slovak Crystallographic Association
https://schema.org/isbn
  • 80-901748-7-6
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