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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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Description
  • Diskutujeme možnosti vývoje křemíkových desek pro pokročilé sub-mikronové polovodičové technologie. Zaměřujeme se na objemové a povrchové valstnosti 150 mm křemíkových desek. Pro vývoj objemových vlastností krystalů křemíku úspěšně využíváme počítačové simulace procesu růstu krystalů. Dosaáhli jsme významného pokroku ve vývoji křemíkových desek vysoké rovinnosti. Výsledky jsou předpokladem pro další práci s deskami větších průměrů. (cs)
  • We discuss possibilities of development of silicon wafers for advanced sub-micron semiconductor technologies. We are focused on both bulk and surface properties of 150 mm silicon wafers. Due to complexity of the matter we demonstrate only the major items and publish our main results. Silicon crystal bulk properties are related to process parameters of crystal growth. We successfully use computer simulation of the process. Verified computer model gives us an important view to the hardly measurable parameters necessary for understanding thermal history and corresponding bulk properties of silicon ingot. We also study possibilities of significant wafer flatness improvement. All results are valuable for development of advanced silicon wafers with larger diameter.
  • We discuss possibilities of development of silicon wafers for advanced sub-micron semiconductor technologies. We are focused on both bulk and surface properties of 150 mm silicon wafers. Due to complexity of the matter we demonstrate only the major items and publish our main results. Silicon crystal bulk properties are related to process parameters of crystal growth. We successfully use computer simulation of the process. Verified computer model gives us an important view to the hardly measurable parameters necessary for understanding thermal history and corresponding bulk properties of silicon ingot. We also study possibilities of significant wafer flatness improvement. All results are valuable for development of advanced silicon wafers with larger diameter. (en)
Title
  • Advanced Silicon Wafer Manufacturing for Sub-Micron Technologies
  • Advanced Silicon Wafer Manufacturing for Sub-Micron Technologies (en)
  • Výroba pokročilé křemíkové desky pro sub-mikronové technologie (cs)
skos:prefLabel
  • Advanced Silicon Wafer Manufacturing for Sub-Micron Technologies
  • Advanced Silicon Wafer Manufacturing for Sub-Micron Technologies (en)
  • Výroba pokročilé křemíkové desky pro sub-mikronové technologie (cs)
skos:notation
  • RIV/26821532:_____/06:#0000006!RIV08-MPO-26821532
http://linked.open.../vavai/riv/strany
  • 418-422
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(FI-IM2/131)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 464242
http://linked.open...ai/riv/idVysledku
  • RIV/26821532:_____/06:#0000006
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Silicon, wafer, Czochralski, semiconductor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [6E4F33319286]
http://linked.open...v/mistoKonaniAkce
  • Rožnov pod Radhoštěm (CZ)
http://linked.open...i/riv/mistoVydani
  • Rožnov pod Radhoštěm (CZ)
http://linked.open...i/riv/nazevZdroje
  • SILICON 2006
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Lorenc, Michal
  • Válek, Lukáš
  • Šik, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • TECON Scientific, s.r.o. (ed. K. Vojtěchovský)
https://schema.org/isbn
  • 80-239-7781-4
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