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  • This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.
  • This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering. (en)
Title
  • Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
  • Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT (en)
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  • Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
  • Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT (en)
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  • RIV/00216305:26310/13:PU105705!RIV14-MPO-26310___
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  • P(FR-TI1/144), P(GAP205/10/2280)
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  • 74966
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  • RIV/00216305:26310/13:PU105705
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  • Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement (en)
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  • [83D71ED502F2]
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  • Mladenova, Daniela
  • Salyk, Ota
  • Weiter, Martin
  • Zhivkov, Ivaylo
  • Ohlídal, Miloslav
  • Milenkov, Viktor
  • Siderov, Vasil
http://localhost/t...ganizacniJednotka
  • 26310
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