About: Nonlitographic Nanostructured Film Fabrication     Goto   Sponge   NotDistinct   Permalink

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Description
  • Nanomechanizující techniky v oblasti tenkých vrstev jsou zde popsány. Prezentované techniky ukazují možnost vytváření nanostruktur bez použití elektronové litografu s vysokým rozlišením. Anodizovaná keramika byla použita jako maska pro vytvoření nanotyčinek. Vytvořeneé struktury byly nanlyzovány pomocí SEM. (cs)
  • The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).
  • The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM). (en)
Title
  • Nonlitographic Nanostructured Film Fabrication
  • Nonlitographic Nanostructured Film Fabrication (en)
  • Nelitorgrafické vytváření nanostrukturovaných vrstev (cs)
skos:prefLabel
  • Nonlitographic Nanostructured Film Fabrication
  • Nonlitographic Nanostructured Film Fabrication (en)
  • Nelitorgrafické vytváření nanostrukturovaných vrstev (cs)
skos:notation
  • RIV/00216305:26220/04:PU44208!RIV06-GA0-26220___
http://linked.open.../vavai/riv/strany
  • 495-500
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP102/04/P162), Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 576403
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/04:PU44208
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Self-ordering, nanopores, nanorods, nanowires (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [82BA19166BAE]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Lanškroun
http://linked.open...i/riv/nazevZdroje
  • 3rd European Microelectrinics and Packaging Symposium
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hubálek, Jaromír
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • IMAPS CZ&SK chapter
https://schema.org/isbn
  • 80-239-2835-X
http://localhost/t...ganizacniJednotka
  • 26220
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