About: The influence of humidity on the kinetics of local anodic oxidation

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Vliv vlhkosti na rychlost lokální anodické oxidace (cs) Abstract. In this paper the influence of relative humidity on fabrication of nanostructures at GaAs (100) surfaces by local anodic oxidation (LAO) is reported. The attention was paid both to the dimensions of oxide nanolines prepared at different relative humidities for tip-surface voltages of 6 - 9 V and tip speeds of 10 - 200 nm/s, and to the profiles corresponding to line trenches (etched in HCl after the nanoxidation). Contrary to the expectations the height and the half-width of oxide nanolines did not increase with relative humidity in the whole interval from 35% to 90%, but for lower relative humidities (< 50%) the lines were comparable in size to those prepared at 90%. However, this was accompanied with instabilities in the oxidation process resulting most probably from enhanced size variations of the water meniscus between the tip and the surface at these low humidities. Abstract. In this paper the influence of relative humidity on fabrication of nanostructures at GaAs (100) surfaces by local anodic oxidation (LAO) is reported. The attention was paid both to the dimensions of oxide nanolines prepared at different relative humidities for tip-surface voltages of 6 - 9 V and tip speeds of 10 - 200 nm/s, and to the profiles corresponding to line trenches (etched in HCl after the nanoxidation). Contrary to the expectations the height and the half-width of oxide nanolines did not increase with relative humidity in the whole interval from 35% to 90%, but for lower relative humidities (< 50%) the lines were comparable in size to those prepared at 90%. However, this was accompanied with instabilities in the oxidation process resulting most probably from enhanced size variations of the water meniscus between the tip and the surface at these low humidities. (en)
Title	The influence of humidity on the kinetics of local anodic oxidation Vliv vlhkosti na rychlost lokální anodické oxidace (cs) The influence of humidity on the kinetics of local anodic oxidation (en)
skos:prefLabel	The influence of humidity on the kinetics of local anodic oxidation Vliv vlhkosti na rychlost lokální anodické oxidace (cs) The influence of humidity on the kinetics of local anodic oxidation (en)
skos:notation	RIV/00216305:26210/07:PU68199!RIV08-GA0-26210___
http://linked.open.../vavai/riv/strany	75-79
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/04/P125), P(IAA1010413), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	0
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Bartošík, Miroslav Jánský, Pavel Šikola, Tomáš Zlámal, Jakub Spousta, Jiří Tomanec, Ondřej Škoda, David Kalousek, Radek
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	426252
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/07:PU68199
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	AFM, LAO, Local oxidation, Silicon, Humidity, Nanostructures (en)
http://linked.open.../riv/klicoveSlovo	Local oxidation Silicon LAO AFM Nanostructures Humidity
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[28D9A41B70E0]
http://linked.open...i/riv/nazevZdroje	Journal of Physics: Conference Series
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanoscience and nanotechnology with scanning probe microscopes: from atomic processes to material properties Structures for Nanophotonics and Nanoelectronics Measurement of surface profiles by noncontact atomic force microscopy
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	61
http://linked.open...iv/tvurceVysledku	Spousta, Jiří Zlámal, Jakub Šikola, Tomáš Škoda, David Kalousek, Radek Tomanec, Ondřej Bartošík, Miroslav Jánský, Pavel
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	1742-6588
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	The influence of humidity on the kinetics of local anodic oxidation The influence of humidity on the kinetics of local anodic oxidation The influence of humidity on the kinetics of local anodic oxidation

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