About: Analysis of thin films by TOF-LEIS

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness. In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness. (en) Analýza tenkých vrstev pomocí ToF-LEIS (cs)
Title	Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS (en) Analýza tenkých vrstev pomocí ToF-LEIS (cs)
skos:prefLabel	Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS (en) Analýza tenkých vrstev pomocí ToF-LEIS (cs)
skos:notation	RIV/00216305:26210/07:PU67845!RIV07-GA0-26210___
http://linked.open.../vavai/riv/strany	335-341
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/05/P288), P(IAA1010413), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2007
http://linked.open...aciTvurceVysledku	Kolíbal, Miroslav Mach, Jindřich Šikola, Tomáš Bábor, Petr Průša, Stanislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	409574
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/07:PU67845
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Time of Flight, TOF, Low energy, Ion Scattering, LEIS, Surfaces (en)
http://linked.open.../riv/klicoveSlovo	LEIS Surfaces Low energy TOF Time of Flight Ion Scattering
http://linked.open...odStatuVydavatele	PL - Polská republika
http://linked.open...ontrolniKodProRIV	[1CD8347049A5]
http://linked.open...i/riv/nazevZdroje	Acta Physica Polonica A
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanoscience and nanotechnology with scanning probe microscopes: from atomic processes to material properties Structures for Nanophotonics and Nanoelectronics Low energy ion scattering
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	111
http://linked.open...iv/tvurceVysledku	Kolíbal, Miroslav Mach, Jindřich Šikola, Tomáš Bábor, Petr Průša, Stanislav
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0587-4246
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS

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