About: Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry

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About: Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper the method based on interpreting the data measured within variable angle of incidence spectroscopic ellipsometry and spectroscopic reflectometry is used for the complete optical analysis of hydrogenated amorphous silicon layers deposited on silicon single crystal wafers. This method enables us to perform the analysis of these layers in a relatively wide spectral region because of both roughness and native oxide layer existing on the upper boundary of every silicon layer studied is respected at its analysis. The results obtained for a chosen sample of the hydrogenated amorphous silicon layer are presented. In this paper the method based on interpreting the data measured within variable angle of incidence spectroscopic ellipsometry and spectroscopic reflectometry is used for the complete optical analysis of hydrogenated amorphous silicon layers deposited on silicon single crystal wafers. This method enables us to perform the analysis of these layers in a relatively wide spectral region because of both roughness and native oxide layer existing on the upper boundary of every silicon layer studied is respected at its analysis. The results obtained for a chosen sample of the hydrogenated amorphous silicon layer are presented. (en) In this paper the method based on interpreting the data measured within variable angle of incidence spectroscopic ellipsometry and spectroscopic reflectometry is used for the complete optical analysis of hydrogenated amorphous silicon layers deposited on silicon single crystal wafers. This method enables us to perform the analysis of these layers in a relatively wide spectral region because of both roughness and native oxide layer existing on the upper boundary of every silicon layer studied is respected at its analysis. The results obtained for a chosen sample of the hydrogenated amorphous silicon layer are presented. (cs)
Title	Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry (en) Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry (cs)
skos:prefLabel	Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry (en) Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry (cs)
skos:notation	RIV/00216224:14310/99:00002088!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	295
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA202/98/0988), P(VS96084)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Munzar, Dominik Navrátil, Karel Hora, Jaroslav Franta, Daniel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	737253
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/99:00002088
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Amorphous silicon films; Optical constants; Roughness (en)
http://linked.open.../riv/klicoveSlovo	Optical constants Amorphous silicon films Roughness
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[F0C530C9FE81]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague
http://linked.open...UplatneniVysledku	1999
http://linked.open...v/svazekPeriodika	343-344
http://linked.open...iv/tvurceVysledku	Franta, Daniel Ohlídal, Ivan Munzar, Dominik Navrátil, Karel Hora, Jaroslav Fizzotti, Franco Manfredotti, Claudio Vittone, Ettore
issn	0040-6090
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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