About: Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A promising method for monitoring of reactive magnetron sputtering, based on the measurement of amplitudes of higher harmonic frequencies of discharge voltages, is proposed. The measurement of the amplitudes can be performed either by an uncompensated probe in the plasma or on the cable between the RF generator and the sputtered target. The sensitivity of the proposed method is significantly better than measurement of other electrical quantities conventionally used for process control. Physical reasons for the change of amplitudes of higher harmonic frequencies during the mode transition were found. The paper shows that the observed changes in amplitudes of higher harmonics by the transition are not caused either by the pressure change, or by the changes in the composition of the gas in the reactor volume. It was found that the amplitudes of higher harmonics reflect primarily the state of the magnetron target poisoning. A promising method for monitoring of reactive magnetron sputtering, based on the measurement of amplitudes of higher harmonic frequencies of discharge voltages, is proposed. The measurement of the amplitudes can be performed either by an uncompensated probe in the plasma or on the cable between the RF generator and the sputtered target. The sensitivity of the proposed method is significantly better than measurement of other electrical quantities conventionally used for process control. Physical reasons for the change of amplitudes of higher harmonic frequencies during the mode transition were found. The paper shows that the observed changes in amplitudes of higher harmonics by the transition are not caused either by the pressure change, or by the changes in the composition of the gas in the reactor volume. It was found that the amplitudes of higher harmonics reflect primarily the state of the magnetron target poisoning. (en)
Title	Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages (en)
skos:prefLabel	Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages (en)
skos:notation	RIV/00216224:14310/10:00044824!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/08/P038), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Vašina, Petr Dvořák, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	272482
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/10:00044824
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	plasma; higher harmonic frequencies; reactive magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo	higher harmonic frequencies plasma reactive magnetron sputtering
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[C7625EC9A8F4]
http://linked.open...i/riv/nazevZdroje	Plasma Sources Sci. Technol.
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Study of hybrid deposition process and its application for thin film deposition
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	19
http://linked.open...iv/tvurceVysledku	Dvořák, Pavel Vašina, Petr
http://linked.open...ain/vavai/riv/wos	000282096600016
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0963-0252
number of pages	8 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages

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