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  • A new method to control whether a radio-freguency (RF) reactive sputtering deposition processes runs in a pre-adjusted experimental conditions was proposed. The frequency spectrum of the cathode voltage and of the voltage on an uncompensated probe immersed in the plasma was measured and it was proved, that some of the harmonics are extremely sensitive markers of the transition between the metallic and the compound mode of the RF sputtering.
  • A new method to control whether a radio-freguency (RF) reactive sputtering deposition processes runs in a pre-adjusted experimental conditions was proposed. The frequency spectrum of the cathode voltage and of the voltage on an uncompensated probe immersed in the plasma was measured and it was proved, that some of the harmonics are extremely sensitive markers of the transition between the metallic and the compound mode of the RF sputtering. (en)
Title
  • Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process
  • Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process (en)
skos:prefLabel
  • Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process
  • Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process (en)
skos:notation
  • RIV/00216224:14310/08:00024835!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP202/08/P038), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 378120
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/08:00024835
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • higher harmonics; plasma; discharge; reactive sputtering; magnetron (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [00A29296523A]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Dvořák, Pavel
  • Vašina, Petr
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • České vysoké učení technické v Praze
https://schema.org/isbn
  • 978-80-01-04030-0
http://localhost/t...ganizacniJednotka
  • 14310
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