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Description
| - The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film.
- The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film. (en)
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Title
| - Study of Mechanical Properties of NCD Coatings
- Study of Mechanical Properties of NCD Coatings (en)
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skos:prefLabel
| - Study of Mechanical Properties of NCD Coatings
- Study of Mechanical Properties of NCD Coatings (en)
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skos:notation
| - RIV/00216224:14310/07:00020900!RIV10-MSM-14310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA106/05/0274), P(GA202/05/0607), Z(MSM0021622411), Z(MSM4977751303)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/07:00020900
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Mechanical Properties; NCD Coatings (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
| - Soláň, Rožnov pod Radhoštěm
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - VI. ročník konferencie Vrstvy a povlaky 2007
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Buršík, Jiří
- Buršíková, Vilma
- Franta, Daniel
- Jašek, Ondřej
- Klapetek, Petr
- Zajíčková, Lenka
- Bláhová, Olga
- Karásková, Monika
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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is http://linked.open...avai/riv/vysledek
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